ECMP Enhances the Planarization Efficiency — a Phenomenon of Reverse Topography during Cu Removal

2007 ◽  
Vol 991 ◽  
Author(s):  
Feng Q Liu ◽  
Wei-Yung Hsu ◽  
Alain Duboust ◽  
Liang Chen
Keyword(s):  
Step Height ◽  
Trench Area ◽  
Cu Passivation ◽  
Field Area ◽  
Key Parameter

ABSTRACTPlanarization efficiency is a key parameter to evaluate the process effectiveness of CMP. When the Cu thickness was removed beyond the step height, under certain conditions, the recessed trenches become protruded, resulting in reverse topography. This reverse topography during bulk Cu removal can only be attributed to the low down force polishing, electrical driving Cu removal and Cu passivation mechanism in ECMP process. In this paper, the concept of reverse topography is introduced and the removal selectivity difference on the trench area and field area during bulk Cu removal is discussed. In ECMP, a “real” 100% planarization efficiency can be achieved when the Cu thickness removed is less than the trench step height. This new understanding in planarization efficiency sheds lights on ways to improve CMP productivity

Preferential Orientation of Photochromic Gadolinium Oxyhydrides

2020 ◽  
Author(s):  
Elbruz Murat Baba ◽  
Jose Montero ◽  
Dmitrii Moldarev ◽  
Marcos V. Moro ◽  
Max Wolff ◽  
...  
Keyword(s):  
Thin Films ◽  
Grain Size ◽  
Rare Earth ◽  
Preferential Orientation ◽  
Reactive Magnetron ◽  
Flow Ratio ◽  
Deposition Pressure ◽  
Step Process ◽  
Oxidation In Air ◽  
Key Parameter

<p>We report preferential orientation control in photochromic gadolinium oxyhydride (GdHO) thin films deposited by a two-step process. Gadolinium hydride (GdH<sub>2-x</sub>) films were grown by reactive magnetron sputtering, followed by oxidation in air. The preferential orientation, grain size, anion concentrations, and photochromic response of the films are strongly dependent on the deposition pressure. GdHO films show preferential orientation along the [100] direction and exhibit photochromism when synthesized at deposition pressures up to 5.8 Pa and. The photochromic contrast is larger than 20 % when the films are deposited below 2.8 Pa with 0.22 H<sub>2</sub>/Ar flow ratio. We argue that the degree of preferential orientation defines the oxygen concentration which is known to be a key parameter for photochromism in rare-earth oxyhydride thin films. The experimental observations described above are explained by the oxidation-induced decrease of the grain size as a result of the increase of the deposition pressure of the sputtering gas. </p>

Correlating Blocking Temperatures in Single Molecule Magnets with Raman Relaxation

2018 ◽  
Author(s):  
Marcus J. Giansiracusa ◽  
Andreas Kostopoulos ◽  
George F. S. Whitehead ◽  
David Collison ◽  
Floriana Tuna ◽  
...  
Keyword(s):  
Relaxation Time ◽  
Single Molecule ◽  
Energy Barrier ◽  
Thermal Relaxation ◽  
Relaxation Mechanism ◽  
Blocking Temperature ◽  
Single Molecule Magnets ◽  
Single Molecule Magnet ◽  
Key Parameter

We report a six coordinate DyIII single-molecule magnet<br>(SMM) with an energy barrier of 1110 K for thermal relaxation of<br>magnetization. The sample shows no retention of magnetization<br>even at 2 K and this led us to find a good correlation between the<br>blocking temperature and the Raman relaxation regime for SMMs.<br>The key parameter is the relaxation time (𝜏<sub>switch</sub>) at the point where<br>the Raman relaxation mechanism becomes more important than<br>Orbach.

PEMILIHAN KEPLING TELADAN MENERAPKAN METODE RANK ORDER CENTROID (ROC) DAN METODE ADDITIVE RATIO ASSESSMENT (ARAS) DI KECAMATAN MEDAN AREA

2019 ◽  
Vol 3 (1) ◽  
Author(s):  
Liza Handayani ◽  
Muhammad Syahrizal ◽  
Kennedi Tampubolon
Keyword(s):  
Decision Making ◽  
Decision Support ◽  
Decision Support System ◽  
Support System ◽  
Rank Order ◽  
Priority Level ◽  
The Village ◽  
Field Area ◽  
Selection Of

The head of the environment is an extension of the head of the village head in assisting or providing services to the community both in the administration of administration in the village and to other problems. It is natural for a kepling to be appreciated for their performance during their special tenure in the kecamatan field area. Previously, the selection of a dipling in a sub-district was very inefficient and seemed unfair for this exemplary selection to use a system to produce an accurate value, and no intentional element. To overcome the process of selecting an exemplary kepling that experiences these obstacles by using an application called a Decision Support System. Decision Support System (SPK) is a system that can solve a problem, and this system is also assisted with several methods, namely the Rank Order Centroid (ROC) method that can assign weight values to each of the criteria based on their priority level. And to do the ranking or determine an exemplary set using the Additive Ratio Assessment (ARAS) method, this method provides decision making that takes decisions based on ranking or the highest value.Keywords: Head of Medan Area Subdistrict, SPK, Centroid Rank Order, Additive Ratio Assessment (ARAS).

Advanced Fringe Analysis Techniques in Circuit Edit

2006 ◽  
Author(s):  
R.K. Jain ◽  
T. Malik ◽  
T.R. Lundquist ◽  
C.-C. Tsao ◽  
W.J. Walecki
Keyword(s):  
Imaging System ◽  
Success Rates ◽  
Endpoint Detection ◽  
Fringe Analysis ◽  
Analysis Techniques ◽  
Aspect Ratios ◽  
Slope Correction ◽  
Trench Area ◽  
And Control ◽  
Thickness Measurements

Abstract Novel Fabry Perot [1] fringe analysis techniques for monitoring the etching process with a coaxial photon-ion column [2] in the Credence OptiFIB are reported. Presently the primary application of these techniques in circuit edit is in trenching either from the front side or from the backside of a device. Optical fringes are observed in reflection geometry through the imaging system when the trench floor is thin and semi-transparent. The observed fringes result from optical interference in the etalon formed between the trench floor (Si in the case of backside trenching) and the circuitry layer beyond the trench floor. In-situ real-time thickness measurements and slope correction techniques are proposed that improve endpoint detection and control planarity of the trench floor. For successful through silicon edits, reliable endpoint detection and co-planarity of a local trench is important. Reliable endpoint detection prevents milling through bulk silicon and damaging active circuitry. Uneven trench floor thickness results in premature endpoint detection with sufficient thickness remaining in only part of the trench area. Good co-planarity of the trench floor also minimizes variability in the aspect ratios of the edit holes, hence increasing success rates in circuit edit.

EFEKTIFITAS PENGELOLAAN DANA DESA UNTUK PEMBANGUNAN DAN PEMBERDAYAAN MASYARAKAT DESA DI KABUPATEN BONDOWOSO

2019 ◽  
Vol 4 (1) ◽  
pp. 9-20
Author(s):  
Boedijono Boedijono ◽  
Galih Wicaksono ◽  
Yeni Puspita ◽  
Sandhika Cipta Bidhari ◽  
Nurcahyaning Dwi Kusumaningrum ◽  
...  
Keyword(s):  
Rural Communities ◽  
Qualitative Methods ◽  
Economic Empowerment ◽  
Quantitative And Qualitative Methods ◽  
Field Area

The purpose of this study was to find out how to manage village finance and the effectiveness of managing village funds for development and economic empowerment of rural communities in Bondowoso District. Three sub-districts in the Bondowoso District, namely Curahdami, Wonoasri, and Tenggarang Subdistricts as field area, and the combination of quantitative and qualitative methods were used. The results of this study indicate that: the villages in Bondowoso District have managed village finances well, but in certain cases, they are still not orderly in administration, so that they sometimes experience delays in disbursing village finance for the following period. The discussion and implications of the findings are discussed in the article.

Inner strut morphology is the key parameter in producing highly porous and mechanically stable poly(ε-caprolactone) scaffolds via selective laser sintering

2021 ◽  
pp. 111986
Author(s):  
Tortorici Martina ◽  
Gayer Christoph ◽  
Torchio Alessandro ◽  
Cho Simone ◽  
Schleifenbaum Johannes Henrich ◽  
...  
Keyword(s):  
Selective Laser Sintering ◽  
Laser Sintering ◽  
Highly Porous ◽  
Key Parameter
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