Reactions in Omcvd: Detection of Gas Phase Radicals In Gaas Deposition Under Single Gas-Surface Collision Conditions

1987 ◽  
Vol 101 ◽  
Author(s):  
D.W. Squire ◽  
C.S. Dulcey ◽  
M.C. Lin

ABSTRACTLaser ionization mass spectrometry has been used to study the deposition of gallium from trimethylgallium with and without AsH3. The apparent Arrhenius activation energy for the production of gas-phase methyl radicals from trimethylgallium is measured to be 28 ± 2 kcal/mol in the presence of AsH3, about the same value as measured in the absence of AsH3. At a substrate temperature of 1150 K where gallium desorption is substantial, addition of AsH3 is found to increase methyl radical yield but drastically decrease gallium atom desorption. A mechanism is presented to describe the deposition of GaAs at low pressures under single gas-surface collision conditions.


1988 ◽  
Vol 131 ◽  
Author(s):  
Y. Zhang ◽  
M. Stuke

ABSTRACTA systematic study to find the role of different metal atoms and ligand combinations on the yield of the photoproducts generated upon irradiation of gas phase organometallics (i.e. metalalkyls) by uv excimer laser radiation was performed using laser ionization mass spectrometry.



2010 ◽  
Vol 58 (2) ◽  
pp. 35-46
Author(s):  
Shinsaku DOBASHI ◽  
Yoshiki YAMAGUCHI ◽  
Yoshinori IZAWA ◽  
Akihide WADA ◽  
Michikazu HARA


2012 ◽  
Vol 84 (13) ◽  
pp. 5633-5640 ◽  
Author(s):  
Jiahui Peng ◽  
Noah Puskas ◽  
Paul B. Corkum ◽  
David M. Rayner ◽  
Alexandre V. Loboda


1969 ◽  
Vol 47 (16) ◽  
pp. 2987-3001 ◽  
Author(s):  
Nobuo Yokoyama ◽  
R. K. Brinton

Methyl radicals generated by di-t-butylperoxide pyrolysis interact at comparable rates with cis-butene-2 in the gas phase by both addition and hydrogen atom abstraction. The determination of the rate of these reactions was simplified by the addition of a large concentration of acetaldehyde to the system. The additive, a source of low activation energy abstractable hydrogen atoms, was effective in suppressing polymerization reactions, and in addition, maintained a high steady state methyl radical concentration as a result of the carbonyl radical decomposition. The rate constants, k5 and k6 for the reactions [5] and [6], were determined to be 4.5 × 1010exp (−7000/RT)and 1.8 × 1010exp (−7300/RT)[Formula: see text]cm3 mole−1 s−1, respectively, over the temperature range 126–163 °C. The butenyl radical formed in reaction [6] isomerizes much faster than its interaction with other species in the system, and the distribution of the various conformations is similar to the equilibrium distribution of the butenes at a similar temperature.



The combustion of gaseous methyl iodide has been studied under conditions of slow and explosive combustion and the behaviour of the methyl iodide, the free radicals OH and IO and the products formaldehyde and iodine has been followed by kinetic spectroscopy. At fairly low pressures ( l.0 to 5.5 cm Hg) the behaviour of the methyl iodide and the OH radicals under conditions of slow and explosive combustion indicates that the reaction between methyl radicals and oxygen proceeds by CH 3 + O 2 → H 2 CO + OH. At higher pressures, under slow combustion conditions, formaldehyde is detectable in the gas phase by reaction between methyl radicals and oxygen. Under slow combustion condi­tions also, the behaviour of the IO radicals and iodine suggests that the iodine atoms produced by the primary photolytic dissociation of m ethyl iodide are temporarily removed in the form of IO radicals, from which the final product iodine is then formed by 2IO → I 2 + O 2 .



1985 ◽  
Vol 54 ◽  
Author(s):  
D. W. Squire ◽  
C. S. Dulcey ◽  
M. C. Lin

ABSTRACTThe low pressure pyrolysis of alkylmetals on resistively heated substrates was studied using multiphoton and electron ionization mass analysis. The activation energy for the production of gas phase methyl radicals from the decomposition of trimethylgallium under single collision conditions was found to be 26 ± 3 kcal/mol, which is to be compared to 13 ± 2 kcal/mol previously observed for trimethylaluminum. No evidence could be found for any surface radical reactions leading to the production of CH4 or C2H6. A proposed deposition mechanism accounting for these observations was tested by pyrolyzing trimethylgallium in the presence of hydrazine. No change in methyl signal was observed, supporting the theory that radical reactions do not occur on the surface under the conditions employed.





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