High Quality Deposition of Strontium Titanate (STO) Thin Films using Sol-Gel Method

2007 ◽  
Vol 1034 ◽  
Author(s):  
Kiyoshi Uchiyama ◽  
Daiki Fukunaga ◽  
Tadashi Shiosaki

AbstractHighly oriented strontium titanate (STO) thin films were successfully deposited on sapphire substrates using a sol-gel method. Sintering temperature of 1400°C and the use of c-cut sapphire for the substrates are the keys to obtain highly oriented thin films. The sample obtained on c-cut sapphire with a sintering temperature of 1400°C showed quite high (111)-orientation and a narrow full width half maximum (FWHM) value of 0.265°, which indicates a high quality deposition of the STO thin films.We believe this high quality STO deposition technique will bring a new scope of oxide material applications for future electronic devices.

2008 ◽  
Vol 34 (4) ◽  
pp. 997-1001 ◽  
Author(s):  
Min Zhao ◽  
Xi Yao ◽  
Peng Shi ◽  
Xiaoyong Wei ◽  
Xiaoqing Wu ◽  
...  

1998 ◽  
Vol 547 ◽  
Author(s):  
H. Nagamoto ◽  
H. Ikewaki

AbstractPorous electrode substrate of La0.7Sr0.2MnO3 was used as the support for the deposition of YSZ thin films. The porosity of the electrode substrate was controlled by sintering temperature and particle size of powders. Thin films of YSZ were fabricated on the electrode by sol-gel method. The YSZ film fabricated by 10-fold coating with 0.05M YSZ sol containing TEA was continuous and crack-free one of 5 mm in thickness. However, hydrogen permeation measurement showed that there was a very small leakage of hydrogen in the fabricated film. In addition to sol-gel method, another technique such as EVD should be employed to make the film completely gas-tight.


2018 ◽  
Vol 20 (22) ◽  
pp. 15236-15243 ◽  
Author(s):  
Hyun-Young Lee ◽  
Jin Luo ◽  
Zhen Zhou ◽  
Wei Sun ◽  
Jing-Feng Li

High-quality (1 −x)(Bi0.5Na0.5)TiO3–xSrTiO3lead-free piezoelectric thin films (x= 0, 0.1, and 0.25) on Pt(111)/Ti/SiO2/Si(100) substrates were prepared by a sol–gel method.


2011 ◽  
Vol 10 (2) ◽  
pp. 187-192 ◽  
Author(s):  
Ramona-Crina Suciu ◽  
Marcela Corina Rosu ◽  
Teofil Danut Silipas ◽  
Emil Indrea ◽  
Violeta Popescu ◽  
...  

Author(s):  
A. V. Ermachikhin ◽  
◽  
N. V. Mukhin ◽  
V. G. Litvinov ◽  
N. B. Rybin ◽  
...  

2014 ◽  
Vol 23 (4) ◽  
pp. 047805 ◽  
Author(s):  
Meng-Meng Cao ◽  
Xiao-Ru Zhao ◽  
Li-Bing Duan ◽  
Jin-Ru Liu ◽  
Meng-Meng Guan ◽  
...  

Author(s):  
S. Ben Yahia ◽  
L. Znaidi ◽  
A. Kanaev ◽  
J.P. Petitet

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