High Quality Deposition of Strontium Titanate (STO) Thin Films using Sol-Gel Method
Keyword(s):
Sol Gel
◽
AbstractHighly oriented strontium titanate (STO) thin films were successfully deposited on sapphire substrates using a sol-gel method. Sintering temperature of 1400°C and the use of c-cut sapphire for the substrates are the keys to obtain highly oriented thin films. The sample obtained on c-cut sapphire with a sintering temperature of 1400°C showed quite high (111)-orientation and a narrow full width half maximum (FWHM) value of 0.265°, which indicates a high quality deposition of the STO thin films.We believe this high quality STO deposition technique will bring a new scope of oxide material applications for future electronic devices.
2011 ◽
Vol 10
(2)
◽
pp. 187-192
◽
2017 ◽
Vol 62
◽
pp. 178-183
2008 ◽
Vol 71
(4)
◽
pp. 1234-1238
◽