Towards a High Quality Factor DC Electric Field Switchable Barium Strontium Titanate Solidly Mounted Resonator

2009 ◽  
Vol 1199 ◽  
Author(s):  
George N. Saddik ◽  
Junwoo Son ◽  
Susanne Stemmer ◽  
Robert A. York
Keyword(s):  
Electric Field ◽  
Quality Factor ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Sapphire Substrate ◽  
Bragg Reflectors ◽  
High Quality ◽  
Barium Strontium ◽  
Dc Electric Field ◽  
Acoustic Loss

AbstractBarium strontium titanate solidly mounted resonators (SMR) were fabricated with three different acoustic Bragg reflectors (ABR) on a sapphire substrate. The three devices had ABR structures consisting of W/SiO2/W/SiO2, Mo/SiO2/Mo/SiO2, and Pt/SiO2/Pt/SiO2 respectively. The s-parameters of all three devices were measured. The results showed that the quality factor increased as a function of the material in the ABR structure. The quality factor for the devices with tungsten, molybdenum and platinum in the ABR structures are 101, 88, and 31, respectively. This investigation showed how the material in the ABR structure can contribute to the acoustic loss in the device.

The Effect of Patterned vs. Unpatterned Acoustic Bragg Reflector on Barium Strontium Titanate Solidly Mounted Resonator

2011 ◽  
Vol 1368 ◽  
Author(s):  
George N. Saddik ◽  
Robert A. York
Keyword(s):  
Quality Factor ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Sapphire Substrate ◽  
Bragg Reflector ◽  
Bragg Reflectors ◽  
Quality Factors ◽  
Barium Strontium ◽  
S Parameters ◽  
Resonant And Antiresonant Frequencies

ABSTRACTBarium strontium titanate solidly mounted resonators were fabricated with patterned and unpatterned acoustic Bragg reflectors on a sapphire substrate. The patterned and unpatterned solidly mounted resonator devices had acoustic Bragg reflectors consisting of Pt/SiO2/Pt/SiO2. The s-parameters of both devices were measured. The results showed that the quality factor increased for the device with the patterned acoustic Bragg reflector structure. The quality factors for the devices with patterned and unpatterned acoustic Bragg reflector structures were 54 and 115 and 28 and 86, respectively at the resonant and antiresonant frequencies. This investigation shows how an unpatterened acoustic Bragg reflector can contribute to the degradation of the overall quality factor of the device.

Fully transparent thin-film varactors: fabrication and performance

2015 ◽  
Vol 3 (22) ◽  
pp. 5703-5708 ◽  
Author(s):  
Shihui Yu ◽  
Lingxia Li ◽  
Weifeng Zhang ◽  
Zheng Sun ◽  
Haoran Zheng
Keyword(s):  
Thin Film ◽  
Electric Field ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Bottom Electrode ◽  
Dielectric Material ◽  
Transparent Conductive Oxide ◽  
Barium Strontium ◽  
Conductive Oxide ◽  
And Performance

We report the fabrication of fully transparent thin-film varactors using a dielectric material, barium strontium titanate (Ba0.6Sr0.4TiO3, BST), as an electric field tunable layer, transparent conductive oxide (Sb doped SnO2, ATO) as a bottom electrode and ATO/Ag tri-layer film as a top electrode.

Laser selective transfer process of barium strontium titanate (BST) on a sapphire substrate

2013 ◽  
Author(s):  
Masayuki Fujita ◽  
Toshihiro Somekawa ◽  
Tetsuo Samoto ◽  
Hideki Hirano ◽  
Kousuke Hikichi ◽  
...  
Keyword(s):  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Transfer Process ◽  
Sapphire Substrate ◽  
Selective Transfer ◽  
Barium Strontium
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