Bromine-Methanol Etching of Cadmium Telluride in a Rotating Disk Reactor
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ABSTRACTThe kinetics of the bromine-methanol etching of CdTe were studied in a rotating disk reactor as a function of temperature, bromine concentration, substrate orientation, and rotation rate. The results indicated that the etching process is mass transfer controlled from -20°C to 40°C and to a maximum rotation rate of 1200 RPM. A one-dimensional transport model was used to obtain effective diffusion coefficients for bromine in methanol. The diffusion coefficient of the etchant in methanol is given by 3.7×10-8 (T/η) cm2/s over the range of 2.5°C to 23°C.
1979 ◽
Vol 57
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pp. 1214-1217
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1984 ◽
Vol 62
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pp. 363-366
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2020 ◽
Vol 62
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pp. 2258-2265
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2019 ◽
Vol 23
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pp. 702-708
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