Analysis of the Si-ON-Insulator Structure by Modeling of the Interface Atomic Arrangement

1983 ◽  
Vol 25 ◽  
Author(s):  
T. Saito ◽  
Y. Yamakoshi ◽  
I. Ohdomari

ABSTRACTA structure of interface between crystalline Si (c-Si) and underlying SiO2 film formed by Si-on-Insulator technique has been analyzed by modeling of interface atomic arrangement. A ball-and-spoke model of a stoichiometrically abrupt c-Si/SiO2 interface has been constructed by connecting a (100) c-Si lattice and a continuous random network model of amorphous SiO2 . A Keating-type potential has been used for the interatomic interactions. The bond bending distortion energy of both Si and O atoms increases at the interface, while the bond stretching energy is negligibly small. The amount of interface energy due to bond distortion is 0.20J/m2.

1998 ◽  
Vol 540 ◽  
Author(s):  
J. M. Gibson ◽  
J-Y. Cheng ◽  
P. Voyles ◽  
M.M.J. TREACY ◽  
D.C. Jacobson

AbstractUsing fluctuation microscopy, we show that ion-implanted amorphous silicon has more medium-range order than is expected from the continuous random network model. From our previous work on evaporated and sputtered amorphous silicon, we conclude that the structure is paracrystalline, i.e. it possesses crystalline-like order which decays with distance from any point. The observation might pose an explanation for the large heat of relaxation that is evolved by ion-implanted amorphous semiconductors.


1999 ◽  
Vol 59 (5) ◽  
pp. 3540-3550 ◽  
Author(s):  
Ming-Zhu Huang ◽  
Lizhi Ouyang ◽  
W. Y. Ching

1996 ◽  
Vol 228-231 ◽  
pp. 537-542 ◽  
Author(s):  
M.C. Jermy ◽  
G.N. Greaves ◽  
M.E. Smith ◽  
G. Bushnell-Wye ◽  
A.C. Hannon ◽  
...  

1985 ◽  
Vol 61 ◽  
Author(s):  
Philip J. Bray

A. A. Lebedev developed a crystallite model for glasses in the 1920's which was supported by the 1930 publication of Randall, Rooksby, and Cooper But, the 1932 publication by Zachariasen entitled “The Atomic Arrangement in Glass” introduced the Warren and Zachariasen continuous random network (CRN) model. In that model, as applied to oxide glasses, oxygen polyhedra surrounding cations (e.g. SiO4 tetrahedra in silicate glasses) are linked together in a random manner to form extensive three-dimensional networks which do not exhibit long-range symmetry or periodicity. Zachariasen did assume that the forces between atoms in glasses and crystals are essentially the same, and noted the same polyhedra in both, but did not discuss any further possible correspondence between glasses and crystals.


1998 ◽  
Vol 81 (22) ◽  
pp. 4899-4902 ◽  
Author(s):  
Yuhai Tu ◽  
J. Tersoff ◽  
G. Grinstein ◽  
David Vanderbilt

1974 ◽  
Vol 29 (5) ◽  
pp. 1201-1206 ◽  
Author(s):  
G. N. Greaves ◽  
E. A. Davis

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