Deposition of Dlc Via Intense Ion Beam Ablation

ABSTRACTDiamond-like carbon films were prepared by high intensity pulsed ion beam ablation of graphite targets. A 350 keV, 35 kA, 400 ns pulse width beam, consisting primarily of carbon ions and protons, was focused onto a graphite target at a fluence of 15-45 J/cm2. Films were deposited onto substrates positioned in an angular array from normal to the target to 90° off normal. Deposition rates up to 30 nm per pulse, corresponding to an instantaneous deposition rate greater than 1 mm/sec, have been observed. Electrical resistivities between 1 and 1000 ohm·cm were measured for these films. XRD scans showed that no crystalline structure developed in the films. SEM revealed that the bulk of the films contain material with feature sizes on the order of 100 nm, but micron size particles were deposited as well. Both Raman and electron energy loss spectroscopy indicated significant amounts of sp3 bonded carbon present in most of the films.

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Electron energy loss spectroscopy of diamond-like carbon thin films

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100130997 ◽

1992 ◽

Vol 50 (2) ◽

pp. 1272-1273

Author(s):

J. Kulik ◽

Y. Lifshitz ◽

G.D. Lempert ◽

S. Rotter ◽

J.W. Rabalais ◽

...

Keyword(s):

Thin Films ◽

Energy Loss ◽

Electron Energy ◽

Ion Beam ◽

Diamond Like Carbon ◽

Ion Beam Deposition ◽

Chemistry Research ◽

Carbon Thin Films ◽

Electron Energy Loss ◽

Beam Deposition

Carbon thin films with diamond-like properties have generated significant interest in condensed matter science in recent years. Their extreme hardness combined with insulating electronic characteristics and high thermal conductivity make them attractive for a variety of uses including abrasion resistant coatings and applications in electronic devices. Understanding the growth and structure of such films is therefore of technological interest as well as a goal of basic physics and chemistry research. Recent investigations have demonstrated the usefulness of energetic ion beam deposition in the preparation of such films. We have begun an electron microscopy investigation into the microstructure and electron energy loss spectra of diamond like carbon thin films prepared by energetic ion beam deposition.The carbon films were deposited using the MEIRA ion beam facility at the Soreq Nuclear Research Center in Yavne, Israel. Mass selected C+ beams in the range 50 to 300 eV were directed onto Si {100} which had been etched with HF prior to deposition.

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Synthesis of Diamond Like Carbon Films Deposited by the Ionization Vapor Method and Development of its Semiconductive Devices Fabricated by the Focused Ga-ion Beam Implantation

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms.137.584 ◽

2017 ◽

Vol 137 (10) ◽

pp. 584-589

Author(s):

Satoshi Kurumi ◽

Yusuke Takahara ◽

Takafumi Ohno ◽

Ken-ichi Matsuda ◽

Kaoru Suzuki

Keyword(s):

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon ◽

Ion Beam Implantation ◽

Vapor Method

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An Study of Influence of Imperfections on the Delamination of Diamond-Like Carbon Films

MRS Proceedings ◽

10.1557/proc-719-f8.36 ◽

2002 ◽

Vol 719 ◽

Author(s):

Myoung-Woon Moon ◽

Kyang-Ryel Lee ◽

Jin-Won Chung ◽

Kyu Hwan Oh

Keyword(s):

Cross Sections ◽

Focused Ion Beam ◽

Imaging System ◽

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon ◽

Glass Substrates ◽

Atomic Force ◽

Initiation And Propagation

AbstractThe role of imperfections on the initiation and propagation of interface delaminations in compressed thin films has been analyzed using experiments with diamond-like carbon (DLC) films deposited onto glass substrates. The surface topologies and interface separations have been characterized by using the Atomic Force Microscope (AFM) and the Focused Ion Beam (FIB) imaging system. The lengths and amplitudes of numerous imperfections have been measured by AFM and the interface separations characterized on cross sections made with the FIB. Chemical analysis of several sites, performed using Auger Electron Spectroscopy (AES), has revealed the origin of the imperfections. The incidence of buckles has been correlated with the imperfection length.

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Large Area Surface Treatment by Ion Beam Technology

MRS Proceedings ◽

10.1557/proc-438-611 ◽

1996 ◽

Vol 438 ◽

Cited By ~ 2

Author(s):

R. L. C. Wu ◽

W. Lanter

Keyword(s):

Ion Beam ◽

High Vacuum ◽

Polycrystalline Diamond ◽

Carbon Films ◽

Ultra High Vacuum ◽

Diamond Like Carbon ◽

Chemical Compositions ◽

Rf Power ◽

Large Area ◽

Ion Energy

AbstractAn ultra high vacuum ion beam system, consisting of a 20 cm diameter Rf excilted (13.56 MHz) ion gun and a four-axis substrate scanner, has been used to modify large surfaces (up to 1000 cm2) of various materials, including; infrared windows, silicon nitride, polycrystalline diamond, 304 and 316 stainless steels, 440C and M50 steels, aluminum alloys, and polycarbonates; by depositing different chemical compositions of diamond-like carbon films. The influences of ion energy, Rf power, gas composition (H2/CH4 , Ar/CH4 and O2/CH4/H2), on the diamond-like carbon characteristics has been studied. Particular attention was focused on adhesion, environmental effects, IR(3–12 μm) transmission, coefficient of friction, and wear factors under spacelike environments of diamond-like carbon films on various substrates. A quadrupole mass spectrometer was utilized to monitor the ion beam composition for quality control and process optimization.

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