Degradation Kinetics of Hydrogenated Amorphous Silicon: The Effect of Embedded Microcrystallites
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ABSTRACTWe have studied the degradation kinetics of undoped a-Si:H films which contain a significant fraction of silicon microcrystallites. The degradation rate is found to be exceptionally slow in the first stage of degradation, then the defect density follows the “normal” t1/3rate and finally saturates. We present a model which relates this abnormal kinetics to the microcrystallites which are embedded in the amorphous matrix.
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1993 ◽
Vol 68
(3)
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pp. 159-165
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