Carbon Doping into GaAs Using Low-Energy Hydrocarbon Ions
Keyword(s):
Ion Beam
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AbstractThe role of hydrogen (H) in carbon (C)-doped GaAs was examined by co-doping of C and H atoms using low-energy hydrocarbon (CH+ and CH3+) ions. Experiments were carried out using the combined ion beam and molecular beam epitaxy (CIBMBE) system. Samples were characterized by low-temperature photoluminescence at 2K and Hall effect measurements at room temperature. Results show that incorporated C atoms are optically and electrically activated as acceptors even by hydrocarbon ion impingement. The effect of H incorporation was found to be noticeable when impinged current density of CH3+ ion beam is high that produces equivalent net hole carrier concentration greater than ∼1018 cm−3
1996 ◽
Keyword(s):
Deposition of Ge1-xCxAlloy on Si by Combined Low-Energy Ion Beam and Molecular Beam Epitaxial Method
1999 ◽
Vol 38
(Part 1, No. 6A)
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pp. 3459-3465
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Keyword(s):