Piezoelectric Measurements with Atomic Force Microscopy
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AbstractAn atomic force microscope (AFM) is used to measure the magnitude of the effective longitudinal piezoelectric constant (d33) of thin films. Measurements are performed with a conducting diamond AFM tip in contact with a top electrode which is driven by an externally applied voltage. The interaction between the tip and electric field present is a potentially large source of error that is eliminated through the use of this configuration and the conducting diamond tips. Measurements yielded reasonable piezoelectric constants of X-cut single crystal quartz, thin film ZnO, Pb(Zr,Ti)O3 (Zr/Ti = 30/70), and nonpiezoelectric amorphous SiO2 thin films. The system was also used to measure d33 hysteresis loops for Pb(Zrx,Ti1−x)O3 thin films.
2006 ◽
Vol 21
(3)
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pp. 547-551
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2021 ◽
2002 ◽
Vol 8
(5)
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pp. 422-428
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2012 ◽
Vol 503-504
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pp. 378-381
2021 ◽
Vol 22
(2)
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pp. 345-354
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1999 ◽
Vol 353
(1-2)
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pp. 194-200
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