Application Fields of SEM/SPM Hybridsystems: Nanoscopic EBIC and Near Field CL
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ABSTRACTSPM/SEM-hybridsystems are more than only a combination of complementary microscopy techniques, because the used probes can simultaneously either be used as sensors, which give access to a vast variety of material properties, or as actuators, which can deliberately modify samples properties. The wide application field as well as flexibility is demonstrated exemplarily on techniques in microanalyses like nano-probing, cathodoluminescence, electron beam induced currents, and thermal analyses. These results provide an interesting perspective with respect to failure analyses and reliability of modern materials and devices.
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1993 ◽
Vol 32
(Part 2, No. 4A)
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pp. L491-L494
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2013 ◽
Vol 22
(11)
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pp. 3175-3181
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1997 ◽
Vol 35
(1-4)
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pp. 345-348
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1999 ◽
Vol 17
(5)
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pp. 1954
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