An Inverter Woven from Flat Component Fibers for e-Textile Applications

2003 ◽  
Vol 769 ◽  
Author(s):  
Eitan Bonderover ◽  
Sigurd Wagner ◽  
Zhigang Suo

AbstractIn the most fundamental approach, e-Textile circuits will be made by weaving component fibers into circuits. The weaving pattern will determine the circuit function. A key requirement of such e-Textile circuits is reliable electrical contact between fibers. Contacts which rely only on the pressure between fibers are preferred since they preserve the drapability of real fabrics. Since thin-film device fabrication technology is planar, the component fibers, made by the slit-film technique, are flat. Thus a slight edge-to-edge curvature (with a radius of curvature as large as 500mm) can either prevent or promote electrical contact. Using fibers with thin-film transistors of amorphous silicon, we study the processes that produce the desired fiber curvature. A layer of stressed silicon nitride is used to create the curvature. The stress in this layer can be controlled by the deposition parameters. We present successful fabrication of curved fibers with vastly improved electrical contact. We also present electrical characterization of woven transistor circuits

1981 ◽  
Vol 4 ◽  
Author(s):  
Rajiv R. Shah ◽  
Robert Mays ◽  
D. Lloyd Crosthwait

ABSTRACTWe report an investigation of the effects of laser processing on the thermal oxides of polysilicon. LPCVD polysilicon, 500 nm thick, deposited on 500 nm thermal oxide of single crystal silicon was laser processed at various stages in the process sequence for device fabrication. Effects of CW Ar+ and pulsed 1.06 and 0.53 μm laser processing were investigated. Laser annealed polysilicon was oxidized in a steam ambient. Using a second level of polysilicon, guard ring diode and capacitors were fabricated. Electrical characterization revealed an improvement in breakdown field strengths of these oxides without deleterious effects on any of the associated interfaces.


Author(s):  
D. Berman-Mendoza ◽  
O. I. Diaz-Grijalva ◽  
R. López-Delgado ◽  
A. Ramos-Carrazco ◽  
M. E. Alvarez-Ramos ◽  
...  

2003 ◽  
Vol 53 (1) ◽  
pp. 503-511 ◽  
Author(s):  
N. K. Pervez ◽  
P. J. Hansen ◽  
T. R. Taylor ◽  
J. S. Speck ◽  
R. A. York

2018 ◽  
Vol 215 (21) ◽  
pp. 1800085 ◽  
Author(s):  
Mototaka Ochi ◽  
Aya Hino ◽  
Hiroshi Goto ◽  
Kazushi Hayashi ◽  
Toshihiro Kugimiya

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