Parallel Tensile Testing of Single-crystal Silicon Microstructures with Integrated Piezoresistive Strain Gauges

2836 Surface stress measurement of single crystal silicon microstructures using Raman spectroscopic uniaxial tensile testing

The proceedings of the JSME annual meeting ◽

10.1299/jsmemecjo.2007.1.0_727 ◽

2007 ◽

Vol 2007.1 (0) ◽

pp. 727-728

Author(s):

Yuji NAGAI ◽

Takahiro NAMAZU ◽

Nobuyuki NAKA ◽

Shinsuke KASHIWAGI ◽

Kunio OHTSUKI ◽

...

Keyword(s):

Single Crystal ◽

Surface Stress ◽

Tensile Testing ◽

Stress Measurement ◽

Single Crystal Silicon ◽

Uniaxial Tensile ◽

Crystal Silicon ◽

Raman Spectroscopic ◽

Uniaxial Tensile Testing ◽

Tensile Testing of Single-Crystal Silicon Thin Films at 600 oC Using Infrared Radiation Heating

Sensors and Materials ◽

10.18494/sam.2010.619 ◽

2010 ◽

pp. 1

Keyword(s):

Thin Films ◽

Single Crystal ◽

Infrared Radiation ◽

Tensile Testing ◽

Single Crystal Silicon ◽

Radiation Heating ◽

Crystal Silicon ◽

Silicon Thin Films

Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2005.851820 ◽

2005 ◽

Vol 14 (5) ◽

pp. 1178-1186 ◽

Cited By ~ 64

Author(s):

T. Tsuchiya ◽

M. Hirata ◽

N. Chiba ◽

R. Udo ◽

Y. Yoshitomi ◽

...

Keyword(s):

Thin Film ◽

Single Crystal ◽

Tensile Testing ◽

Single Crystal Silicon ◽

Testing Methods ◽

T0302-2-6 In-situ TEM Experiment of Tensile Testing for Single-Crystal-Silicon Thin Film

The proceedings of the JSME annual meeting ◽

10.1299/jsmemecjo.2010.8.0_263 ◽

2010 ◽

Vol 2010.8 (0) ◽

pp. 263-264

Author(s):

Taeko ANDO ◽

Hidekazu Ishihara ◽

Masahiro Nakajima ◽

Shigeo Arai ◽

Toshio Fukuda ◽

...

Keyword(s):

Thin Film ◽

Single Crystal ◽

Tensile Testing ◽

Single Crystal Silicon ◽

In Situ Tem ◽

Silicon Thin Film ◽

OS1909 Tensile Testing on (110) Thin Film Single Crystal Silicon with Different Processing Conditions

The Proceedings of the Materials and Mechanics Conference ◽

10.1299/jsmemm.2012._os1909-1_ ◽

2012 ◽

Vol 2012 (0) ◽

pp. _OS1909-1_-_OS1909-2_

Author(s):

Akio UESUGI ◽

Yoshikazu HIRAI ◽

Koji SUGANO ◽

Toshiyuki TSUCHIYA ◽

Osamu TABATA

Keyword(s):

Thin Film ◽

Single Crystal ◽

Tensile Testing ◽

Single Crystal Silicon ◽

Processing Conditions ◽

Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment

Japanese Journal of Applied Physics ◽

10.7567/jjap.53.06jm03 ◽

2014 ◽

Vol 53 (6S) ◽

pp. 06JM03 ◽

Cited By ~ 4

Author(s):

Mohamed E. Mitwally ◽

Toshiyuki Tsuchiya ◽

Osamu Tabata ◽

Sherif Sedky

Keyword(s):

Tensile Strength ◽

Single Crystal ◽

Laser Treatment ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Elastic moduli, strength, and fracture initiation at sharp notches in etched single crystal silicon microstructures

Journal of Applied Physics ◽

10.1063/1.369711 ◽

1999 ◽

Vol 85 (7) ◽

pp. 3519-3534 ◽

Cited By ~ 73

Author(s):

Wan Suwito ◽

Martin L. Dunn ◽

Shawn J. Cunningham ◽

David T. Read

Keyword(s):

Single Crystal ◽

Elastic Moduli ◽

Single Crystal Silicon ◽

Fracture Initiation ◽

Crystal Silicon ◽

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE ◽

Cross comparison of thin film tensile-testing methods examined with single-crystal silicon, polysilicon, nickel, and titanium films

10.1109/memsys.2003.1189837 ◽

2003 ◽

Cited By ~ 9

Author(s):

T. Tsuchiya ◽

M. Hirata ◽

N. Chiba ◽

R. Udo ◽

Y. Yoshitom ◽

...

Keyword(s):

Thin Film ◽

Single Crystal ◽

Tensile Testing ◽

Single Crystal Silicon ◽

Testing Methods ◽

Force measurement using integrated shear strain gauge in parallel tensile testing for single crystal silicon

The Proceedings of Mechanical Engineering Congress Japan ◽

10.1299/jsmemecj.2017.j2210105 ◽

2017 ◽

Vol 2017 (0) ◽

pp. J2210105

Author(s):

Kanji YASUDA ◽

Akio UESUGI ◽

Yoshikazu HIRAI ◽

Toshiyuki TSUCHIYA ◽

Osamu TABATA

Keyword(s):

Single Crystal ◽

Shear Strain ◽

Strain Gauge ◽

Tensile Testing ◽

Force Measurement ◽

Single Crystal Silicon ◽

OS1418-467 Dynamic stress measurement of single crystal silicon microstructures using micro Raman spectroscopy

The Proceedings of the Materials and Mechanics Conference ◽

10.1299/jsmemm.2015._os1418-46 ◽

2015 ◽

Vol 2015 (0) ◽

pp. _OS1418-46-_OS1418-46

Author(s):

Toshiyuki TSUCHIYA ◽

Yusuke KOGITA ◽

Yoshikazu HIRAI ◽

Osamu TABATA

Keyword(s):

Raman Spectroscopy ◽

Single Crystal ◽

Dynamic Stress ◽

Stress Measurement ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Micro Raman Spectroscopy ◽