scholarly journals Effect of Substrate Bias Voltage on Structure and Corrosion Resistance of AlCrN Coatings Prepared by Multi-Arc Ion Plating

2021 ◽  
pp. ArticleID:210938
Author(s):  
Yihong Zhao ◽  
Keyword(s):  
Corrosion Resistance ◽  
Bias Voltage ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Arc Ion Plating ◽  
Ion Plating

scholarly journals Effect of Deposition Parameters on Microstructure of the Ti-Mg Immiscible Alloy Thin Film Deposited by Multi-Arc Ion Plating

Metals ◽  
2019 ◽  
Vol 9 (11) ◽  
pp. 1229
Author(s):  
Wei ◽  
Dong ◽  
Qu ◽  
Ma ◽  
Shen
Keyword(s):  
Thin Film ◽  
Electron Microscopy ◽  
Thin Films ◽  
Bias Voltage ◽  
Gas Pressure ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Ion Plating ◽  
Deposition Parameters ◽  
Ar Gas

Ti-Mg immiscible alloy thin films were prepared using a multi-arc ion plating technique with various deposition parameters. The surface and cross-section morphologies, crystal structures, and chemical compositions of the Ti-Mg films were investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD), and transmission electron microscopy (TEM). The influence of the substrate negative bias voltage and Ar gas pressure on the microstructure of the Ti-Mg films was systematically studied. Mg atoms were incorporated into the Ti lattice to form an FCC immiscible supersaturated solid solution phase in the thin film. Microparticles were observed on the film surface, and the number of microparticles could be significantly reduced by decreasing the substrate bias voltage and increasing the Ar gas pressure. The appropriate substrate bias voltage and Ar gas pressure increased the deposition rate. The TEM results indicated that columnar, nanolayer, and equiaxed nanocrystals were present in the thin films. Ti and Mg fluctuations were still evident in the nanoscale structures.

Oxidation-Resistance of (Ti,Al,Cr,Y)N Coatings Prepared by Arc Ion Plating

2010 ◽  
Vol 177 ◽  
pp. 338-341
Author(s):  
Ming Sheng Li ◽  
Yong Zhong Fan ◽  
Shu Juan Zhang
Keyword(s):  
Oxidation Resistance ◽  
Crystal Size ◽  
Substrate Bias ◽  
Compressor Blades ◽  
Arc Ion Plating ◽  
Ion Plating ◽  
Cr Content ◽  
Heat Treated ◽  
Aero Engine ◽  
Engine Compressor

In this study, composite metastable (Ti0.49Al0.49Y0.02)N, (Ti0.44Al0.44Cr0.1Y0.02)N and (Ti0.34Al0.34Cr0.3Y0.02)N coatings were respectively deposited on a wrought martensite steel 1Cr11Ni2W2MoV for aero-engine compressor blades by arc ion plating technique with a pulse substrate bias. All the coatings have B1NaCl phase structure with a (220) preferred orientation and dense structures. The introduction of chromium into the coatings gave rise to a minute shrinkage of crystal lattice and a decrease of crystal size. Annealed at 800°C, Oxidation-resistance of the coatings improved with increased Cr content. But heat-treated at 900°C, the incorporation of Cr gave rise to obvious decrease of oxidation-resistance.

Improvement of Zr film purity by using a purified sputtering target and negative substrate bias voltage

2006 ◽  
Vol 201 (3-4) ◽  
pp. 1899-1901 ◽  
Author(s):  
J.-W. Lim ◽  
J.W. Bae ◽  
Y.F. Zhu ◽  
S. Lee ◽  
K. Mimura ◽  
...  
Keyword(s):  
Bias Voltage ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Negative Substrate Bias
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