Influence of substrate bias voltage on deposition behavior and micro-indentation hardness of Ti–Si–N coatings by a hybrid coating system of arc ion plating and sputtering techniques

2004 ◽  
Vol 179 (1) ◽  
pp. 89-94 ◽  
Author(s):  
Sung Ryong Choi ◽  
In-Wook Park ◽  
Jong Hyun Park ◽  
Kwang Ho Kim
Keyword(s):  
Bias Voltage ◽  
Hybrid Coating ◽  
Indentation Hardness ◽  
Coating System ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Deposition Behavior ◽  
Ion Plating ◽  
Influence Of Substrate ◽  
Micro Indentation

Influence of substrate bias voltage on the properties of sputtered nickel oxide thin films

2012 ◽  
Author(s):  
A. Mallikarjuna Reddy ◽  
Ch. Seshendra Reddy ◽  
Y. Ashok Kumar Reddy ◽  
R. Lydia ◽  
P. Sreedhara Reddy ◽  
...  
Keyword(s):  
Thin Films ◽  
Nickel Oxide ◽  
Bias Voltage ◽  
Substrate Bias ◽  
Oxide Thin Films ◽  
Substrate Bias Voltage ◽  
Influence Of Substrate ◽  
Nickel Oxide Thin Films

Influence of substrate bias voltage on the microstructure of nc-SiO x :H film

2015 ◽  
Vol 24 (2) ◽  
pp. 028102 ◽  
Author(s):  
Hui-Min Li ◽  
Wei Yu ◽  
Yan-Mei Xu ◽  
Yun Ji ◽  
Zhao-Yi Jiang ◽  
...  
Keyword(s):  
Bias Voltage ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Influence Of Substrate

Influence of substrate bias voltage on properties of Pt thin films deposited by non-mass separated ion beam deposition method

2009 ◽  
Vol 63 (26) ◽  
pp. 2181-2184 ◽  
Author(s):  
Joon Woo Bae ◽  
Jae-Won Lim ◽  
Kouji Mimura ◽  
Masahito Uchikoshi ◽  
Mitsuhiro Wada ◽  
...  
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Ion Beam ◽  
Substrate Bias ◽  
Deposition Method ◽  
Substrate Bias Voltage ◽  
Ion Beam Deposition ◽  
Influence Of Substrate ◽  
Beam Deposition

scholarly journals Study of the influence of substrate bias voltage on the texture of Nb coatings deposited on a Cu substrate

2020 ◽  
Vol 1713 ◽  
pp. 012026
Author(s):  
A A Lozovan ◽  
S Ya Betsofen ◽  
A A Labutin ◽  
A S Lenkovets ◽  
I A Grushin ◽  
...  
Keyword(s):  
Bias Voltage ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Cu Substrate ◽  
Influence Of Substrate
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