Enhanced measurement of high aspect ratio surfaces by applied sensor tilting
Keyword(s):
During tactile surface measurements the contact point between probing tip and surface varies depending on the local surface angle. To reduce the resulting measurement deviation on high slopes a probing principle is investigated that applies a dynamic surface dependent sensor tilt. This probing process and the logics for the angle determination have been evaluated by simulation. A test stand based on a nanometer coordinate measuring machine is developed and fitted with a rotation kinematic based on stacked rotary axes. Systematic positioning deviations of the kinematic are reduced by a compensation field. The test stand has been completed and results are presented.
2005 ◽
Vol 128
(3)
◽
pp. 697-704
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2018 ◽
Vol 12
(4)
◽
pp. 264-271
◽
2011 ◽
Vol 35
(3)
◽
pp. 424-430
◽
Keyword(s):