Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage
2011 ◽
Vol 35
(3)
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pp. 424-430
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Keyword(s):
2011 ◽
Vol 301-303
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pp. 617-622
2010 ◽
Vol 447-448
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pp. 590-594
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2011 ◽
Keyword(s):
2019 ◽
Vol 2019.72
(0)
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pp. C42