Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage

2011 ◽  
Vol 35 (3) ◽  
pp. 424-430 ◽  
Author(s):  
Ping Yang ◽  
Tomohiko Takamura ◽  
Satoru Takahashi ◽  
Kiyoshi Takamasu ◽  
Osamu Sato ◽  
...  
2011 ◽  
Vol 301-303 ◽  
pp. 617-622
Author(s):  
Z. Y. Yang ◽  
D. H. Liu ◽  
F. Yang ◽  
Z. G. Xie ◽  
Y. Huang

Aim to the low measuring precision of non-cylinder pin hole using the coordinate measuring machine(CMM)and pneumatic measuring instrument, a new solution is proposed which use the high-precision digital lever probe to detect the contours of pin hole with a single clamping situation. The measuring principal of non-cylinder pin hole of piston is introduced and the functions and measuring processes of the measurement system are also presented. The software modules are given and the probe centering error and the parallelism movement error are discussed detailedly. A measuring example is given in the end. The measuring results show that the measurement system has the ability to detect the contours of pin hole with high-precision and efficiently.


2010 ◽  
Vol 447-448 ◽  
pp. 590-594 ◽  
Author(s):  
Ping Yang ◽  
Shusaku Shibata ◽  
Satoru Takahashi ◽  
Kiyoshi Takamasu ◽  
Osamu Sato ◽  
...  

To develop a high precision Micro Coordinate Measuring Machine (Micro-CMM), it is important to evaluate an X-Y stage on the Micro-CMM. A precision multi-probe measurement system has been designed and developed for simultaneously measuring the yaw and straightness errors of the X-Y stage. In the system, an autocollimator measures the yaw error of the stage, and two laser interferometers measure the profile of a standard mirror which is fixed on the X-Y stage. The straightness error is reconstructed by the application of simultaneous equation and least-squares methods, and the uncertainty associated with the multi-probe method is simulated. When the interval of the laser interferometers equals 10 mm, the standard deviation of multi-probe method using the high accuracy autocollimator and the laser interferometers is about 10 nm. The simulation results satisfy our purpose for the uncertainty of 50 nm, and practical considerations are discussed.


2015 ◽  
Vol 23 (3) ◽  
pp. 639-644
Author(s):  
杜洋 DU Yang ◽  
高志山 GAO Zhi-shan

Machines ◽  
2021 ◽  
Vol 9 (2) ◽  
pp. 33
Author(s):  
Peng-Hao Hu ◽  
Ying-Jun Lei ◽  
Yang-Kai Ou

This paper systematically summarized the technical state of art and research results on the motion error of a linear guideway, corrected some misconceptions, and further clarified the relationship between the straightness error of the guide rail itself and the motion error of the linear stage. Moreover, a new method based on parallel mechanism is provided to study the motion errors of the linear guide pair. The basic idea is to abstract the structural relationship between the stage and the guide rail into a 4-bar parallel mechanism. Thus, the stage can be considered as a moving platform in the parallel mechanism. Its motion error analysis is also transferred to moving platform position analysis in the parallel mechanism. The straightness motion error and angular motion error of the stage can be analyzed simultaneously by using the theory of parallel mechanism. Some experiments were conducted on the linear guideway of a self-developed parallel coordinate measuring machine. The experimental data and analysis verify the feasibility and correctness of this method.


2014 ◽  
Vol 14 (1) ◽  
pp. 1-7 ◽  
Author(s):  
A. Gąska ◽  
D. Szewczyk ◽  
P. Gąska ◽  
M. Gruza ◽  
J. Sładek

Abstract Nowadays, simulators facilitate tasks performed daily by the engineers of different branches, including coordinate metrologists. Sometimes it is difficult or almost impossible to program a Coordinate Measuring Machine (CMM) using standard methods. This happens, for example, during measurements of nano elements or in cases when measurements are performed on high-precision (accurate) measuring machines which work in strictly air-conditioned spaces and the presence of the operator in such room during the programming of CMM could cause an increase in temperature, which in turn could make it necessary to wait some time until conditions stabilize. This article describes functioning of a simulator and its usage during Coordinate Measuring Machine programming in the latter situation. Article also describes a general process of programming CMMs which ensures the correct machine performance after starting the program on a real machine. As an example proving the presented considerations, measurement of exemplary workpiece, which was performed on the machine working in the strictly air-conditioned room, was described


2019 ◽  
Vol 2019.72 (0) ◽  
pp. C42
Author(s):  
Yuto KAJITANI ◽  
Syuhei KUROKAWA ◽  
Tetsuya TAGUCHI ◽  
Yuuu MIYAMOTO ◽  
Terutake HAYASHI ◽  
...  

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