scholarly journals Active Plasma Species in TiN Film Formation Process by Plasma CVD Method

1992 ◽  
Vol 100 (1166) ◽  
pp. 1184-1191 ◽  
Author(s):  
Yoshiro ISHII ◽  
Takashi SHIBATA ◽  
Yuichi YOSHINO ◽  
Hiroshi ICHIMURA ◽  
Kuniaki KOBAYASHI
Keyword(s):  
Formation Process ◽  
Film Formation ◽  
Active Plasma ◽  
Plasma Cvd ◽  
Cvd Method ◽  
Tin Film ◽  
Plasma Species

Dominant plasma species for TiN film formation by plasma CVD

1997 ◽  
Vol 30 (17) ◽  
pp. 2397-2402 ◽  
Author(s):  
A B Rodrigo ◽  
C Lasorsa ◽  
M Shimozuma ◽  
F Alvarez ◽  
P Perillo
Keyword(s):  
Film Formation ◽  
Plasma Cvd ◽  
Tin Film ◽  
Plasma Species

Effects of Magnetic Fields and Excited Plasma Species on Silicon Oxide Film Formation by Microwave Plasma CVD

1988 ◽  
Author(s):  
Takuya Fukuda ◽  
Kazuo Suzuki ◽  
Yasuhiro Mochizuki ◽  
Michio Ohue ◽  
Naohiro Momma ◽  
...  
Keyword(s):  
Magnetic Fields ◽  
Oxide Film ◽  
Silicon Oxide ◽  
Microwave Plasma ◽  
Film Formation ◽  
Plasma Cvd ◽  
Silicon Oxide Film ◽  
Plasma Species ◽  
Microwave Plasma Cvd

Synthesis of diamond on substrate with mechanical treatment by RF plasma CVD method

1993 ◽  
Vol 2 (1) ◽  
pp. 18-22 ◽  
Author(s):  
Y Shimada ◽  
K Kobayashi ◽  
N Mutsukura ◽  
Y Machi
Keyword(s):  
Mechanical Treatment ◽  
Rf Plasma ◽  
Plasma Cvd ◽  
Cvd Method

scholarly journals Paint Film Formation Process in Spray Coating

1986 ◽  
Vol 59 (12) ◽  
pp. 711-718 ◽  
Author(s):  
Kazuyuki TACHI ◽  
Chikaaki OKUDA ◽  
Yoichi OYAMA ◽  
Shouichi SUZUKI
Keyword(s):  
Formation Process ◽  
Film Formation ◽  
Paint Film ◽  
Spray Coating

Mechanical Coating Technique and Its Development as a Novel Film Formation Process

2020 ◽  
Vol 2020 (0) ◽  
pp. 16A12
Author(s):  
Yun LU ◽  
Hiroyuki YOSHIDA ◽  
Liang HAO ◽  
Sujun GUAN ◽  
Satoshi SEKI
Keyword(s):  
Formation Process ◽  
Film Formation ◽  
Coating Technique ◽  
Mechanical Coating

scholarly journals Preparation and Property of Tantalum Fine Powder by Arc-Plasma CVD Method.

1991 ◽  
Vol 107 (12) ◽  
pp. 895-898
Author(s):  
Tadao SATO ◽  
Utao NISHINO ◽  
Kazuyoshi SHIMAKAGE
Keyword(s):  
Fine Powder ◽  
Arc Plasma ◽  
Plasma Cvd ◽  
Cvd Method

scholarly journals Properties of Amorphous Carbon Films Synthesized by Atmospheric Pressure Glow Plasma CVD Method

2006 ◽  
Vol 19 (5) ◽  
pp. 673-678 ◽  
Author(s):  
Hideyuki Kodama ◽  
Satoshi Iizumi ◽  
Masayuki Nakaya ◽  
Akira Shirakura ◽  
Atsushi Morita ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Atmospheric Pressure ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Amorphous Carbon Films ◽  
Cvd Method ◽  
Atmospheric Pressure Glow Plasma ◽  
Glow Plasma

Diamond-like carbon films from CO source gas by RF plasma CVD method

2014 ◽  
Vol 54 (1S) ◽  
pp. 01AD04 ◽  
Author(s):  
Yuki Yasuoka ◽  
Toru Harigai ◽  
Jun-Seok Oh ◽  
Hiroshi Furuta ◽  
Akimitsu Hatta ◽  
...  
Keyword(s):  
Carbon Films ◽  
Rf Plasma ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Cvd Method
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