scholarly journals Structural characterization of mist chemical vapor deposited amorphous aluminum oxide films using water-free solvent

2019 ◽  
Vol 127 (8) ◽  
pp. 590-593
Author(s):  
Zenji YATABE ◽  
Koshi NISHIYAMA ◽  
Takaaki TSUDA ◽  
Yusui NAKAMURA
Keyword(s):  
Aluminum Oxide ◽  
Structural Characterization ◽  
Oxide Films ◽  
Chemical Vapor ◽  
Chemical Vapor Deposited

Structural characterization of amorphous SiCxNy chemical vapor deposited coatings

1997 ◽  
Vol 81 (9) ◽  
pp. 6147-6154 ◽  
Author(s):  
A. Bendeddouche ◽  
R. Berjoan ◽  
E. Bêche ◽  
T. Merle-Mejean ◽  
S. Schamm ◽  
...  
Keyword(s):  
Structural Characterization ◽  
Chemical Vapor ◽  
Chemical Vapor Deposited

Synthesis and characterization of mist chemical vapor deposited aluminum titanium oxide films

2019 ◽  
Vol 58 (7) ◽  
pp. 070905 ◽  
Author(s):  
Zenji Yatabe ◽  
Koshi Nishiyama ◽  
Takaaki Tsuda ◽  
Kazuki Nishimura ◽  
Yusui Nakamura
Keyword(s):  
Titanium Oxide ◽  
Oxide Films ◽  
Chemical Vapor ◽  
Synthesis And Characterization ◽  
Chemical Vapor Deposited ◽  
Titanium Oxide Films

Carbon incorporation in chemical vapor deposited aluminum oxide films

2010 ◽  
Vol 518 (14) ◽  
pp. 3658-3663 ◽  
Author(s):  
Benjamin W. Schmidt ◽  
Bridget R. Rogers ◽  
Cameron K. Gren ◽  
Timothy P. Hanusa
Keyword(s):  
Aluminum Oxide ◽  
Oxide Films ◽  
Chemical Vapor ◽  
Carbon Incorporation ◽  
Chemical Vapor Deposited

Characterization of amorphous aluminum oxide films prepared by the pyrosol process

2000 ◽  
Vol 368 (1) ◽  
pp. 74-79 ◽  
Author(s):  
A. Ortiz ◽  
J.C. Alonso ◽  
V. Pankov ◽  
A. Huanosta ◽  
E. Andrade
Keyword(s):  
Aluminum Oxide ◽  
Oxide Films
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