scholarly journals Research on material selection of force-sensitive element for high-frequency dynamic piezoelectric pressure sensor

2022 ◽  
Vol 355 ◽  
pp. 01026
Author(s):  
Sikang Cai ◽  
Guicong Wang ◽  
Yingjun Li ◽  
Xiaoqi Yang
Keyword(s):  
Pressure Sensor ◽  
High Frequency ◽  
Sensitive Element ◽  
Material Selection ◽  
Coupling Effect ◽  
Dynamic Performance ◽  
Pressure Sensors ◽  
Great Sensitivity ◽  
Sensing Element ◽  
Piezoelectric Pressure Sensor

The high-frequency dynamic piezoelectric pressure sensor has the advantages of simple structure, long service life, high natural frequency, excellent signal-to-noise ratio and great sensitivity. It is appropriate for measuring high dynamic, dynamic or quasi-static pressure changes and pressure fluctuations. And this kind of sensor is widely utilized in the shock wave testing. The force-sensitive element is one of the main factors affecting the static and dynamic performance of piezoelectric pressure sensors. Basing on the piezoelectric equation and coupling effect between mechanics and electricity, in this paper, the finite element model of the high-frequency dynamic piezoelectric pressure sensor is established. The influences of the force-sensing element on the sensitivity of the sensor are analysed. Referential suggestions for choosing force-sensitive element of high-frequency dynamic piezoelectric pressure sensor are provided.

CMOS-MEMS Based Current Mirror MOSFET Embedded Pressure Sensor for Healthcare and Biomedical Applications

2013 ◽  
Vol 647 ◽  
pp. 315-320 ◽  
Author(s):  
Pradeep Kumar Rathore ◽  
Brishbhan Singh Panwar
Keyword(s):  
Pressure Sensor ◽  
Biomedical Applications ◽  
Circuit Simulation ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Cmos Technology ◽  
Current Mirror ◽  
Sensing Element ◽  
Pressure Sensing ◽  
Cmos Mems

This paper reports on the design and optimization of current mirror MOSFET embedded pressure sensor. A current mirror circuit with an output current of 1 mA integrated with a pressure sensing n-channel MOSFET has been designed using standard 5 µm CMOS technology. The channel region of the pressure sensing MOSFET forms the flexible diaphragm as well as the strain sensing element. The piezoresistive effect in MOSFET has been exploited for the calculation of strain induced carrier mobility variation. The output transistor of the current mirror forms the active pressure sensing MOSFET which produces a change in its drain current as a result of altered channel mobility under externally applied pressure. COMSOL Multiphysics is utilized for the simulation of pressure sensing structure and Tspice is employed to evaluate the characteristics of the current mirror pressure sensing circuit. Simulation results show that the pressure sensor has a sensitivity of 10.01 mV/MPa. The sensing structure has been optimized through simulation for enhancing the sensor sensitivity to 276.65 mV/MPa. These CMOS-MEMS based pressure sensors integrated with signal processing circuitry on the same chip can be used for healthcare and biomedical applications.

An Innovative Technology for Measuring The Dynamic Characteristics of Pressure Sensors

2006 ◽  
Vol 505-507 ◽  
pp. 1057-1062 ◽  
Author(s):  
Ho Chang ◽  
Mu Jung Kao ◽  
Tsing Tshih Tsung ◽  
J.L. Wu
Keyword(s):  
Dynamic Characteristics ◽  
Spectrum Analysis ◽  
Pressure Sensor ◽  
High Frequency ◽  
Pressure Wave ◽  
Hydraulic System ◽  
Output Voltage ◽  
Pressure Sensors ◽  
Innovative Technology ◽  
Wave Generator

This study developed a square-like pressure wave generator as an excitation source to test dynamic characteristics of pressure sensors. The developed generator can generate a square-like pressure wave of as high as 2 kHz and can achieve high-frequency switching by utilizing the differential principle through a series of mechanical rotations between the revolving spindle and revolving ring. The square-like pressure wave generated is input into the hydraulic system while the output voltage signals given by the pressure sensor can be analyzed by spectrum analysis to obtain dynamic characteristics of the pressure sensor

Single-chip solution for electronics unit of a smart pressure sensor

Sensor Review ◽  
2020 ◽  
Vol 40 (5) ◽  
pp. 529-534
Author(s):  
Igor S. Nadezhdin ◽  
Aleksey G. Goryunov
Keyword(s):  
Pressure Sensor ◽  
Sensitive Element ◽  
Noise Immunity ◽  
Pressure Sensors ◽  
Cost Effective ◽  
Differential Pressure ◽  
Manufacturing Cost ◽  
Content Type ◽  
Differential Pressure Sensor ◽  
Developed Pressure

Purpose Differential pressure is an important technological parameter, one urgent task of which is control and measurement. To date, the lion’s share of research in this area has focused on the development and improvement of differential pressure sensors. The purpose of this paper is to develop a smart differential pressure sensor with improved operational and metrological characteristics. Design/methodology/approach The operating principle of the developed pressure sensor is based on the capacitive measurement principle. The measuring unit of the developed pressure sensor is based on a differential capacitive sensitive element. Programmable system-on-chip (PSoC) technology has been used to develop the electronics unit. Findings The use of a differential capacitive sensitive element allows the unit to compensate for the influence of interference (for example, temperature) on the measurement result. With the use of PSoC technology, it is also possible to increase the noise immunity of the developed smart differential pressure sensor and provide an unparalleled combination of flexibility and integration of analog and digital functionality. Originality/value The use of PSoC technology in the developed smart differential pressure sensor has many indisputable advantages, as the size of the entire circuit can be minimized. As a result, the circuit has improved noise immunity. Accordingly, the procedure for debugging and changing the software of the electronics unit is simplified. These features make development and manufacturing cost effective.

scholarly journals Dynamic and Stationary Performance Analysis of Diaphragm Based Acoustic Pressure Sensor

2019 ◽  
Vol 8 (6) ◽  
pp. 4108-4115
Keyword(s):  
Performance Analysis ◽  
Natural Frequency ◽  
Pressure Sensor ◽  
Acoustic Pressure ◽  
Dynamic Pressure ◽  
Dynamic Performance ◽  
Pressure Sensors ◽  
Stress And Strain ◽  
Sensor Structure ◽  
Dynamic Performance Analysis

Pressure sensing and measurement are of utmost importance in many of the process industries and biomedical applications. The key element of the pressure sensor is diaphragm and the diaphragm design including shape and dimensions play a major role in sensitivity of pressure sensor irrespective of the type of sensor viz. capacitive, piezoresistive or piezoelectric sensor. The acoustic pressure sensors require the proper analysis of dynamic performance of the key element since the acoustic source is dynamic pressure. This paper presents the stationary and dynamic performance analysis of diaphragm for piezoelectric acoustic pressure sensor. The analysis has been done for better deflection of the diaphragm and optimized stress and strain in order to achieve maximum sensitivity. In design step, at first the diaphragm is analysed for natural frequency, modal frequencies and bandwidth of the structure since the piezoelectric resonant sensors can be used for sensing whenresonant frequency of the membrane is at least 3 to 5 times the highest applied frequency and for energy harvesting applications, when it is almost equal to the applied frequency.Hence, a comparison of shapes of diaphragm, with their fundamental and modal frequencies, deflection, and stress and strain is established. Further a resonant sensor structure is also analyzed for dynamic performance with cavity neck of different size to understand the importance of cavity neck in dynamic performance of the sensor. The circular diaphragm is found be the best choice from the point of view of maximum deflection and natural frequency and the structure with cavity neck has better bandwidth and deflection.

MEMS piezoresistive pressure sensor with patterned thinning of diaphragm

2020 ◽  
Vol 37 (3) ◽  
pp. 147-153
Author(s):  
Zoheir Kordrostami ◽  
Kourosh Hassanli ◽  
Amir Akbarian
Keyword(s):  
Pressure Sensor ◽  
Design Methodology ◽  
Pressure Sensors ◽  
Mems Sensors ◽  
Sensors And Actuators ◽  
Content Type ◽  
Sensor Performance ◽  
Piezoresistive Pressure Sensor ◽  
Piezoelectric Pressure Sensor ◽  
First Time

Purpose The purpose of this study is to find a new design that can increase the sensitivity of the sensor without sacrificing the linearity. A novel and very efficient method for increasing the sensitivity of MEMS pressure sensor has been proposed for the first time. Rather than perforation, we propose patterned thinning of the diaphragm so that specific regions on it are thinner. This method allows the diaphragm to deflect more in response with regard to the pressure. The best excavation depth has been calculated and a pressure sensor with an optimal pattern for thinned regions has been designed. Compared to the perforated diaphragm with the same pattern, larger output voltage is achieved for the proposed sensor. Unlike the perforations that have to be near the edges of the diaphragm, it is possible for the thin regions to be placed around the center of the diaphragm. This significantly increases the sensitivity of the sensor. In our designation, we have reached a 60 per cent thinning (of the diaphragm area) while perforations larger than 40 per cent degrade the operation of the sensor. The proposed method is applicable to other MEMS sensors and actuators and improves their ultimate performance. Design/methodology/approach Instead of perforating the diaphragm, we propose a patterned thinning scheme which improves the sensor performance. Findings By using thinned regions on the diaphragm rather than perforations, the sensitivity of the sensor was improved. The simulation results show that the proposed design provides larger membrane deflections and higher output voltages compared to the pressure sensors with a normal or perforated diaphragm. Originality/value The proposed MEMS piezoelectric pressure sensor for the first time takes advantage of thinned diaphragm with optimum pattern of thinned regions, larger outputs and larger sensitivity compared with the simple or perforated diaphragm pressure sensors.

scholarly journals Material selection for optimum design of MEMS pressure sensors

2019 ◽  
Vol 26 (9) ◽  
pp. 2751-2766
Author(s):  
Zahid Mehmood ◽  
Ibraheem Haneef ◽  
Florin Udrea
Keyword(s):  
Optimum Design ◽  
Pressure Sensor ◽  
Material Selection ◽  
Pressure Sensors ◽  
Optimum Performance ◽  
Suitable Material ◽  
Micro Scale ◽  
Selection For ◽  
Scale Properties ◽  
Mems Pressure Sensors

Abstract Choice of the most suitable material out of the universe of engineering materials available to the designers is a complex task. It often requires a compromise, involving conflicts between different design objectives. Materials selection for optimum design of a Micro-Electro-Mechanical-Systems (MEMS) pressure sensor is one such case. For optimum performance, simultaneous maximization of deflection of a MEMS pressure sensor diaphragm and maximization of its resonance frequency are two key but totally conflicting requirements. Another limitation in material selection of MEMS/Microsystems is the lack of availability of data containing accurate micro-scale properties of MEMS materials. This paper therefore, presents a material selection case study addressing these two challenges in optimum design of MEMS pressure sensors, individually as well as simultaneously, using Ashby’s method. First, data pertaining to micro-scale properties of MEMS materials has been consolidated and then the Performance and Material Indices that address the MEMS pressure sensor’s conflicting design requirements are formulated. Subsequently, by using the micro-scale materials properties data, candidate materials for optimum performance of MEMS pressure sensors have been determined. Manufacturability of pressure sensor diaphragm using the candidate materials, pointed out by this study, has been discussed with reference to the reported devices. Supported by the previous literature, our analysis re-emphasizes that silicon with 110 crystal orientation [Si (110)], which has been extensively used in a number of micro-scale devices and applications, is also a promising material for MEMS pressure sensor diaphragm. This paper hence identifies an unexplored opportunity to use Si (110) diaphragm to improve the performance of diaphragm based MEMS pressure sensors.

A Full Printed Flexible Pressure Sensor with Improved Temperature Performance based on Optimized Curing Mechanism

2021 ◽  
Author(s):  
Jingnan Ma ◽  
Mengmeng Liang ◽  
Wei Wang
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Flexible Electronics ◽  
Material Selection ◽  
Pressure Sensors ◽  
Functional Materials ◽  
Temperature Performance ◽  
Curing Mechanism ◽  
Flexible Pressure Sensor ◽  
Flexible Pressure Sensors

Printable flexible pressure sensors have many important applications in wearable systems. One major challenge of such a sensor is to maintain sensing properties in high temperature. By optimizing the curing mechanism of the flexible pressure sensor functional materials, this paper proposes a new method of achieving high temperature properties for a full printed sensor. The establishment of curing theory is mainly studied. The printing process of this kind of sensor is systematically stated and tested to check whether it can continue to function at high temperatures. Ultimately a fully-printed flexible pressure sensor with good temperature performance is achieved. The paper focuses around the technical route of “material selection—theoretical analysis —function material preparation—design and preparation of device—device performance evaluation”. Suitable materials are used in flexible pressure sensors and the curing mechanism is established. This proposed technique can be extended to the development of other printable flexible sensors, which can lead to a huge impact on future applications of the flexible electronics.

Micro-pressure sensor dynamic performance analysis

Sensor Review ◽  
2014 ◽  
Vol 34 (4) ◽  
pp. 367-373 ◽  
Author(s):  
Bian Tian ◽  
Yulong Zhao ◽  
Zhe Niu ◽  
Jiang Zhuangde
Keyword(s):  
Dynamic Characteristics ◽  
Pressure Sensor ◽  
Dynamic Pressure ◽  
Dynamic Performance ◽  
Pressure Sensors ◽  
Dynamic Responses ◽  
Content Type ◽  
Dynamic Performances ◽  
Traditional Structures ◽  
Dynamic Performance Analysis

Purpose – The purpose of this paper is to report on a piezoresistive pressure sensor for micro-pressure measurement with a cross-beam membrane (CBM) structure. This study analyzes the dynamic characteristics of the proposed device. Design/methodology/approach – This CBM sensor possesses high stiffness and sensitivity, measuring dynamic pressure more effectively in a high-frequency environment compared with other piezoresistive structures. The dynamic characteristics are derived using the finite element method to analyze the dynamic responses of the new structure, including natural frequency and lateral effect performances. The CBM dynamic performances are compared with traditional structures. Findings – The pressure sensor performance was evaluated, and the experimental results indicate that they all exhibit similar dynamic characteristics as the designed model. Compared with traditional structures such as the single island, the CBM proves to be superior in evaluating the dynamic performances of pressure sensors at high frequencies of > 30 kHz. Originality/value – Most studies of this micro pressure sensors attempt to promote the sensitivity or focus on the static performance of pressure sensor with micro gauge. This study is concerned with analyze the dynamic characterism of micro pressure sensor and compared with the traditional structures, that prove the CBM structure has stable dynamic performance and is a better option for measuring dynamic micro pressure in biomedical applications.

Design of biomimetic human-skin-like tactile flexible sensor

Sensor Review ◽  
2019 ◽  
Vol 39 (3) ◽  
pp. 397-406
Author(s):  
Xiaozhou Lu ◽  
Xi Xie ◽  
Qiaobo Gao ◽  
Hanlun Hu ◽  
Jiayi Yang ◽  
...  
Keyword(s):  
Human Skin ◽  
Pressure Sensor ◽  
Material Selection ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Structure Design ◽  
Design Parameters ◽  
Lower Electrode ◽  
Pressure Sensing ◽  
Content Type

Purpose The hands of intelligent robots perceive external stimuli and respond effectively according to tactile or pressure sensors. However, the traditional tactile and pressure sensors cannot perform human-skin-like intelligent properties of high sensitivity, large measurement range, multi-function and flexibility simultaneously. The purpose of this paper is to present a flexible tactile-pressure sensor based on hyper-elastics polydimethylsiloxane and plate capacitance. Design/methodology/approach With regard to this problem, this paper presents a flexible tactile-pressure sensor based on hyper-elastics PDMS and plate capacitance. The sensor has a size of 10 mm × 10 mm × 1.3 mm and is composed of four upper electrodes, one middle driving electrode and one lower electrode. The authors first analyzed the structure and the tactile-pressure sensing principle of human skin to obtain the design parameters of the sensor. Then they presented the working principle, material selection and mechanical structure design and fabrication process of the sensor. The authors also fabricated several sample devices of the sensor and carried out experiments to establish the relationship between the sensor output and the pressure. Findings The results show that the tactile part of the sensor can measure a range of 0.05-1N/mm2 micro pressure with a sensitivity of 2.93 per cent/N and a linearity of 0.03 per cent. The pressure part of the sensor can measure a range of 1-30N/mm2 pressure with a sensitivity of 0.08 per cent/N and a linearity of 0.07 per cent. Originality/value This paper analyzes the tactile and pressure sensing principles of human skin and develop an intelligent sensitive human-skin-like tactile-pressure sensor for intelligent robot perception systems. The sensor can achieve to imitate the tactile and pressure function simultaneously with a measurement resolution of 0.01 N and a spatial resolution of 2 mm.

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