scholarly journals Properties of Highly Transparent Conductive Ga-Doped ZnO Films prepared on Polymer Substrates by Reactive Plasma Deposition with DC Arc Discharge

2009 ◽  
Vol 22 (4) ◽  
pp. 497-502 ◽  
Author(s):  
Aki Miyake ◽  
Takahiro Yamada ◽  
Hisao Makino ◽  
Naoki Yamamoto ◽  
Tetsuya Yamamoto
Keyword(s):  
Plasma Deposition ◽  
Arc Discharge ◽  
Zno Films ◽  
Polymer Substrates ◽  
Reactive Plasma ◽  
Doped Zno ◽  
Dc Arc

Temperature dependence of electrical properties of Ga-doped ZnO films deposited by ion plating with DC arc discharge

2013 ◽  
Vol 528 ◽  
pp. 19-25 ◽  
Author(s):  
T. Terasako ◽  
H. Song ◽  
H. Makino ◽  
S. Shirakata ◽  
T. Yamamoto
Keyword(s):  
Electrical Properties ◽  
Temperature Dependence ◽  
Arc Discharge ◽  
Zno Films ◽  
Ion Plating ◽  
Doped Zno ◽  
Dc Arc

Effects of oxygen gas flow rates and Ga contents on structural properties of Ga-doped ZnO films prepared by ion-plating with a DC arc discharge

2015 ◽  
Vol 596 ◽  
pp. 24-28 ◽  
Author(s):  
Tomoaki Terasako ◽  
Junichi Nomoto ◽  
Hisao Makino ◽  
Naoki Yamamoto ◽  
Sho Shirakata ◽  
...  
Keyword(s):  
Structural Properties ◽  
Gas Flow ◽  
Arc Discharge ◽  
Zno Films ◽  
Flow Rates ◽  
Ion Plating ◽  
Oxygen Gas ◽  
Doped Zno ◽  
Dc Arc

scholarly journals On-Demand Metal-Oxide Polycrystalline Films Deposited byReactive Plasma Deposition with Dc-Arc Discharge

2019 ◽  
Vol 55 (11) ◽  
pp. 404-413
Author(s):  
Tetsuya YAMAMOTO ◽  
Hisashi KITAMI ◽  
Makoto MAEHARA ◽  
Yutaka FURUBAYASHI ◽  
Toshiyuki SAKEMI
Keyword(s):  
Metal Oxide ◽  
Plasma Deposition ◽  
Arc Discharge ◽  
Polycrystalline Films ◽  
On Demand ◽  
Dc Arc

Photoconductivity of Ga doped polycrystalline ZnO films grown by reactive plasma deposition

2007 ◽  
Vol 244 (5) ◽  
pp. 1483-1489 ◽  
Author(s):  
Seiichi Kishimoto ◽  
Kunihiko Hayashi ◽  
Hirofumi Hamaguchi ◽  
Hisashi Makino ◽  
Takahiro Yamada ◽  
...  
Keyword(s):  
Plasma Deposition ◽  
Zno Films ◽  
Reactive Plasma
Sign in / Sign up

Export Citation Format

Share Document