ABSTRACTThin films of SrTiO3 and Ba0.4Sr0.6TiO3 have been pulse laser ablated onto LaAIO3 substrates. Normal metal coplanar capacitor electrodes were patterned on top of these films and the capacitors were incorporated into weakly coupled microstrip resonators. Resonant frequencies and Q's were measured as a function of bias at room temperature and at 77 K. The microwave frequency capacitance and loss is calculated from the resonant properties and compared with the simultaneously measured 1 MHz capacitance and dissipation. Two-tone intermodulation distortion products were measured and the third-order intercept is referenced to the microwave voltage across the capacitors. Commercially available semiconductor varactors were tested in a similar manner. The tuning quality (the ratio of the relative capacitance tuning to dissipation), frequency dispersion, and power handling of these capacitors are compared. Although there appears to be no intrinsic power handling advantage of the paraelectrics over the semiconductor varactors, the paraelectric varactors can offer better tuning quality.