scholarly journals Electrical glow discharges and plasma parameter of planar sputtering system for silver target

2018 ◽  
Vol 16 (37) ◽  
pp. 65-72
Author(s):  
Mazin H. Hasan

DC planar sputtering system is characterized by varying discharge potential of (250-2000 volt) and Argon gas pressures of (3.5×10-2 – 1.5) mbar. The breakdown voltage for silver electrode was studied with a uniform electric field at different discharge distances, as well as plasma parameters. The breakdown voltage is a product of the Argon gas pressure inside the chamber and gab distance between the electrodes, represent as Paschen curve. The Current-voltage characteristics curves indicate that the electrical discharge plasma is working in the abnormal glow region. Plasma parameters were found from the current-voltage characteristics of a single probe positioned at the inter-cathode space. Typical values of the electron temperature and the electron density are in the range of (2.93 –5.3) eV and (10-16 -10-17) m-3 respectively.

1969 ◽  
Vol 3 (2) ◽  
pp. 161-178 ◽  
Author(s):  
E. W. Billington

The primary quantities characterizing the electricaJ carriers of a flowing plasma in a low density wind tunnel have been determined from measurements using electrostatic probes immersed in the plasma. With the exception of the ion temperature, the plasma parameters have been obtained from the current—voltage characteristics of two types of single electrode probe. The probes consist of a cylinder, the major axis of which is aligned parallel to the flow of the plasma, and a disk, the exposed surface of which is normal to the direction of flow. Experiments with a double electrode probe consisting of a disk-shaped collector electrode which is screened from direct exposure to the plasma by a fine wire mesh, grid electrode, made it possible to obtain current—voltage characteristics with the ion and electron components separated from one another. From the current—voltage characteristic corresponding to collection of ions, using the screen grid probe, values of the ion temperature and drift velocity have been obtained. The measurements have been made at various points along the centre line of flow, for one particular value of the flow rate using argon as the test gas. For a given position of the probes, one value of the ion temperature has been evaluated, together with two independent values of each of the other primary quantities characterizing the electrical carriers of a flowing plasma. Each pair of values agree satisfactorily amongst themselves, good agreement being generally obtained between probe theory and experiment.


2009 ◽  
Vol 615-617 ◽  
pp. 963-966 ◽  
Author(s):  
Taku Horii ◽  
Tomihito Miyazaki ◽  
Yu Saito ◽  
Shin Hashimoto ◽  
Tatsuya Tanabe ◽  
...  

Gallium nitride (GaN) vertical Schottky barrier diodes (SBDs) with a SiNx field plate (FP) structure on low-dislocation-density GaN substrates have been designed and fabricated. We have successfully achieved the SBD breakdown voltage (Vb) of 680V with the FP structure, in contrast to that of 400V without the FP structure. There was no difference in the forward current-voltage characteristics with a specific on-resistance (Ron) of 1.1mcm2. The figure of merit V2b/Ron of the SBD with the FP structure was 420MWcm-2. The FP structure and the high quality drift layers grown on the GaN substrates with low dislocation densities have greatly contributed to the obtained results.


1996 ◽  
Vol 422 ◽  
Author(s):  
S. J. Chang

Nd-doped semiconductor light-emitting diodes were fabricated by implanting Nd ions into a GaAs epi-layer. The fabricated GaAs:Nd diodes show good current-voltage characteristics with a typical reverse breakdown voltage between 8 and 12 V By injecting minority carriers into the diodes, Nd3+ related emissions were observed, at 77 K, in the 0.92, 1.11, and 1.3 μm regions. These electroluminescence signals correspond to the transitions from Nd3+4F3/2 state to the Nd3+4I9/2, 4I1/2, and 4I13/2 states, respectively. The measured external quantum efficiency of the GaAs:Nd diodes at 77 K, was 5 × 10−7.


2020 ◽  
pp. 154-158
Author(s):  
V.A. Lisovskiy ◽  
S.V. Dudin ◽  
P.P. Platonov ◽  
V.D. Yegorenkov

We report the breakdown curves and current-voltage characteristics (CVC) of the Townsend mode DC discharge we have measured in carbon dioxide. We compare the breakdown curves measured with two different techniques. With the first technique we regard as breakdown voltage the maximum voltage which we can apply across the electrodes without igniting the discharge with fixed values of the inter-electrode distance and the gas pressure. With the second technique we register the CVC of the Townsend mode in the μA-mA range and then extrapolate them to zero current. We reveal that in the nA-μA range the CVCs of the Townsend mode may have a complicated behavior due to the formation of the space charge. Therefore the second technique furnishes incorrect values of the breakdown voltage.


2010 ◽  
Vol 36 (12) ◽  
pp. 1040-1064 ◽  
Author(s):  
N. A. Dyatko ◽  
Yu. Z. Ionikh ◽  
A. V. Meshchanov ◽  
A. P. Napartovich ◽  
K. A. Barzilovich

2013 ◽  
Vol 79 (5) ◽  
pp. 559-567 ◽  
Author(s):  
T. ABDUL KAREEM ◽  
A. ANU KALIANI

AbstractI–V characteristics of air glow discharge, ionic liquid–contact air glow discharge and ionic liquid–air glow discharge are presented and photographs of the discharges are shown. It is found that the I–V characteristics of the air glow discharge always obey Ohm's law but I–V characteristics of the ionic liquid–contact air glow discharge and ionic liquid–air glow discharge obey Ohm's law only up to a particular voltage. A sudden burst of the electrolyte is observed for currents above a critical current.


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