Design of Piezoelectric Acceleration Sensor for Automobile Applications

Piezoelectric acceleration sensor and piezoelectric acceleration sensor device

The Journal of the Acoustical Society of America ◽

10.1121/1.405368 ◽

1993 ◽

Vol 93 (6) ◽

pp. 3536-3536

Author(s):

Shiro Nakayama

Keyword(s):

Acceleration Sensor ◽

Sensor Device ◽

Piezoelectric Acceleration

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Characteristics Research of a High Sensitivity Piezoelectric MOSFET Acceleration Sensor

Sensors ◽

10.3390/s20174988 ◽

2020 ◽

Vol 20 (17) ◽

pp. 4988

Author(s):

Chunpeng Ai ◽

Xiaofeng Zhao ◽

Dianzhong Wen

Keyword(s):

High Sensitivity ◽

Oxide Semiconductor ◽

Voltage Sensitivity ◽

Test Results ◽

Acceleration Sensor ◽

Piezoelectric Beam ◽

Silicon Cantilever ◽

Gate Control ◽

Piezoelectric Acceleration ◽

Peak Value

In order to improve the output sensitivity of the piezoelectric acceleration sensor, this paper proposed a high sensitivity acceleration sensor based on a piezoelectric metal oxide semiconductor field effect transistor (MOSFET). It is constituted by a piezoelectric beam and an N-channel depletion MOSFET. A silicon cantilever beam with Pt/ZnO/Pt/Ti multilayer structure is used as a piezoelectric beam. Based on the piezoelectric effect, the piezoelectric beam generates charges when it is subjected to acceleration. Due to the large input impedance of the MOSFET, the charge generated by the piezoelectric beam can be used as a gate control signal to achieve the purpose of converting the output charge of the piezoelectric beam into current. The test results show that when the external excitation acceleration increases from 0.2 g to 1.5 g with an increment of 0.1 g, the peak-to-peak value of the output voltage of the proposed sensors increases from 0.327 V to 2.774 V at a frequency of 1075 Hz. The voltage sensitivity of the piezoelectric beam is 0.85 V/g and that of the proposed acceleration sensor was 2.05 V/g, which is 2.41 times higher than the piezoelectric beam. The proposed sensor can effectively improve the voltage output sensitivity and can be used in the field of structural health monitoring.

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Design Optimization of Bulk Piezoelectric Acceleration Sensor for Enhanced Performance

Sensors ◽

10.3390/s19153360 ◽

2019 ◽

Vol 19 (15) ◽

pp. 3360 ◽

Cited By ~ 4

Author(s):

Min-Ku Lee ◽

Seung-Ho Han ◽

Kyu-Hyun Park ◽

Jin-Ju Park ◽

Whung-Whoe Kim ◽

...

Keyword(s):

Resonant Frequency ◽

Opposite Effect ◽

Acceleration Sensor ◽

Electric Voltage ◽

Design Variables ◽

Simulation Based ◽

Inner Diameter ◽

Design Characteristics ◽

Positive Effect ◽

Piezoelectric Acceleration

While seeking to achieve high performances of a bulk piezoelectric acceleration sensor, we investigated the behavior of the design variables of the sensor components and optimized the sensor design using a numerical simulation based on piezoelectric analysis and metamodeling. The optimized results demonstrated that there was an exponential dependency in the trade-off relation between two performance indicators, the electric voltage and the resonant frequency, as induced by the design characteristics of the sensor. Among the design variables, a decrease in the base height and epoxy thickness and an increase in the piezo element’s inner diameter had a positive effect on two performances, while the head dimensions (diameter and height) exhibited the opposite effect on them. The optimal sensor designs are proposed within the valid range of resonant frequency (25–47.5 kHz). Our redesign of a commercial reference sensor improved the resonant frequency by 13.2% and the electric voltage by 46.1%.

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Design of Signal Processing Circuit under the Principle of EMC of the Piezoelectric Acceleration Sensor

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.536-537.320 ◽

2014 ◽

Vol 536-537 ◽

pp. 320-324

Author(s):

Deng Hua Li ◽

Cui Hao

Keyword(s):

Signal Processing ◽

Electromagnetic Interference ◽

High Frequency ◽

Electromagnetic Pulse ◽

Acceleration Sensor ◽

Design And Optimization ◽

Acceleration Sensors ◽

Signal Processing Circuit ◽

Processing Circuit ◽

Piezoelectric Acceleration

Although piezoelectric acceleration sensors enclosure can shield electromagnetic pulse commendably, the electromagnetic pulse can be coupled into the sensor and interfere signal processing circuit in the high-frequency electromagnetic environment, which can lead to the failure of acceleration sensor. So, the reasonable design and optimization are necessary for the improvement of signal processing circuit anti-electromagnetic interference ability under the principle of EMC. Some methods were proposed in this paper, such as adding a filter circuit, increasing the spacing between the wires and increasing the number of ground wires, etc. Finite integration technique (FIT) is used in this paper for these simulations in CST software. Simulating results show that the transfer impedances of signal processing circuit under the high-frequency electromagnetic interference were greatly reduced after optimization and power integrity was greatly improved. It achieves the goal of enhancing electromagnetic interference resistance of the signal processing circuit, thereby reduces the influence of the electromagnetic pulse on the piezoelectric acceleration sensor greatly.

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Design of High Performance Signal Disposal Circuit for Piezoelectric Acceleration Sensor

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.427-429.2041 ◽

2013 ◽

Vol 427-429 ◽

pp. 2041-2044 ◽

Cited By ~ 1

Author(s):

Qing Chun Zhang ◽

Zhao Heng Zhang

Keyword(s):

High Performance ◽

Dynamic Testing ◽

Design Method ◽

Dynamic Monitoring ◽

Price Ratio ◽

Acceleration Sensor ◽

Pass Filter ◽

Low Pass Filter ◽

A Charge ◽

Piezoelectric Acceleration

According to general piezoelectric acceleration sensor measurement circuit existing problems in the dynamic testing field, the paper proposes the modular, integration design method, using the integrated chips CA3140 to design the signal disposal circuit, in order to reduce the cost and improve the circuit SNR, enhance the stability and reliability of the circuit. This circuit includes a charge amplifier, conditional amplifier, low-pass filter, high-pass filter and output amplifier. The test shows that the circuit functions are complete, it is practical and reliable. It has a higher performance price ratio, and can be widely used in the dynamic monitoring and the diagnosis of fault or defect about the equipment and structure.

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