scholarly journals Modal Engineering for MEMS Devices: Application to Galvos and Scanners

2020 ◽  
Author(s):  
Lawrence Barrett ◽  
Matthias Imboden ◽  
Josh Javor ◽  
David K. Campbell ◽  
David J. Bishop
Keyword(s):  
High Speed ◽  
Open Loop ◽  
Optical Systems ◽  
Control Algorithms ◽  
Mems Devices ◽  
Open Loop Control ◽  
Optical Elements ◽  
Loop Control ◽  
High Q ◽  
Change Position

Optical systems typically use galvanometers (aka galvos) and scanners. Galvos move optical elements such as mirrors, quasi-statically, from one static position to another, and an important figure of merit is their step-settle relaxation time. Scanners move in an oscillatory fashion, typically at the device resonant frequency. MEMS devices, which have many advantages and are often used in such optical systems, are typically high Q devices. Moving from one position to another for a galvo or one frequency/amplitude to another for scanners, can take many periods to settle following the ring down. During these transitions, the optical system is inactive and the time is not being efficiently used. In this article we show how a novel class of open loop control algorithms can be used to rapidly change position, frequency and amplitude, typically in well under the period of the device. We show how the MEMS designer can excite, with complete, high-speed control, a vibrational mode of the system. We call this modal engineering, the ability to control the modes of the system in a practical, fast way. This control of the modes is accomplished with open loop control algorithms.

Yield Improvement via minimization of step height non-uniformity in Chemical Mechanical Planarization (CMP)

2005 ◽  
Vol 867 ◽  
Author(s):  
Muthukkumar Kadavasal ◽  
Sutee Eamkajornsiri ◽  
Abhijit Chandra ◽  
Ashraf F. Bastawros
Keyword(s):  
Chemical Mechanical Planarization ◽  
Open Loop ◽  
Step Height ◽  
Control Algorithms ◽  
Open Loop Control ◽  
Time Step ◽  
Surface Evolution ◽  
Loop Control ◽  
Final Surface ◽  
Pattern Density

AbstractObtaining local and global planarity is one of the prime criteria in dielectric and metal planarizations. Although Chemical Mechanical Planarization (CMP) helps us achieve this criterion in constant pattern density surfaces, the same is not true for variable pattern density surfaces this results in formation of global step heights across the die. This paper provides a pressure open loop control algorithms for obtaining planarity across a die containing variations in pattern densities. Based on the variation of pattern density and surface heights across the die, the surfaces are separated into zones and the pressure is varied spatially and/or temporally to obtain uniform surface heights, with enhanced step height uniformity. One of the algorithms looks ahead and recalculates/modifies the pressure values by identifying the step heights that could be formed after a specified time step. The final surface predictions have improved uniformity on the upper surface as well as on the step heights across the entire die. The simulation would help us track the polishing process for each time step and guide us with the optimized pressure values that can be applied in order to an uniform final surface evolution.

scholarly journals Turbulent boundary layer under the control of different schemes

2017 ◽  
Vol 473 (2202) ◽  
pp. 20170038 ◽  
Author(s):  
Z. X. Qiao ◽  
Y. Zhou ◽  
Z. Wu
Keyword(s):  
Boundary Layer ◽  
Turbulent Boundary Layer ◽  
High Speed ◽  
Control Strategies ◽  
Local Maximum ◽  
Open Loop ◽  
Open Loop Control ◽  
Feed Forward ◽  
Loop Control ◽  
Combined Feed

This work explores experimentally the control of a turbulent boundary layer over a flat plate based on wall perturbation generated by piezo-ceramic actuators. Different schemes are investigated, including the feed-forward, the feedback, and the combined feed-forward and feedback strategies, with a view to suppressing the near-wall high-speed events and hence reducing skin friction drag. While the strategies may achieve a local maximum drag reduction slightly less than their counterpart of the open-loop control, the corresponding duty cycles are substantially reduced when compared with that of the open-loop control. The results suggest a good potential to cut down the input energy under these control strategies. The fluctuating velocity, spectra, Taylor microscale and mean energy dissipation are measured across the boundary layer with and without control and, based on the measurements, the flow mechanism behind the control is proposed.

scholarly journals Modal Engineering of Inductive Circuits to Achieve Rapid Settling Times

2021 ◽  
Author(s):  
Josh Javor ◽  
Lawrence Barrett ◽  
Matthias Imboden ◽  
Russ Giannetta ◽  
David K. Campbell ◽  
...  
Keyword(s):  
Magnetic Fields ◽  
Open Loop ◽  
Hall Sensor ◽  
Control Algorithms ◽  
Rf Coils ◽  
Design Element ◽  
Open Loop Control ◽  
Modeling Tools ◽  
Loop Control ◽  
Important Design

Inductive circuits and devices are a ubiquitous and important design element in many applications such as magnetic drives, galvanometers, magnetic scanners, applying DC magnetic fields to systems, RF coils in NMR systems and vast array of other applications. They are widely used to generate both DC and AC magnetic fields. Many of these applications require a rapid step and settling time, turning the DC or AC magnetic field on and off quickly. The inductive response normally makes this a challenging thing to do. In this article we discuss open loop control algorithms for achieving rapid step and settling times in four general categories of applications: DC and AC systems where the system is either under or over damped. Each of these four categories requires a different algorithm which we describe here. We show the operation of these drive methods using Simulink and Simscape modeling tools, analytical solutions to the underlying differential equations and in experimental results using an inductive magnetic coil and a Hall sensor. Finally, we demonstrate application of these techniques to significantly reduce ringing in a standard NMR circuit. We intend this article to be practical with useful, easy to apply algorithms and helpful tuning tricks.

scholarly journals Open loop control theory algorithms for high-speed 3D MEMS optical switches

2020 ◽  
Vol 28 (2) ◽  
pp. 2010 ◽  
Author(s):  
C. Pollock ◽  
F. Pardo ◽  
M. Imboden ◽  
D. J. Bishop
Keyword(s):  
Control Theory ◽  
High Speed ◽  
Open Loop ◽  
Optical Switches ◽  
Open Loop Control ◽  
Loop Control
Sign in / Sign up

Export Citation Format

Share Document