EEPROM Failure Analysis Methodology : Can Programmed Charges be Measured Directly by Electrical Techniques of Scanning Probe Microscopy (SPM)?

2005 ◽  
Author(s):  
Christophe De Nardi ◽  
Romain Desplats ◽  
Philippe Perdu ◽  
Félix Beaudoin ◽  
Jean Luc Gauffier
Keyword(s):  
Scanning Probe Microscopy ◽  
Floating Gate ◽  
Scanning Probe ◽  
Kelvin Probe ◽  
Oxide Interfaces ◽  
Probe Microscopy ◽  
Kelvin Probe Microscopy ◽  
Force Microscopy ◽  
Analysis Methodology ◽  
Electric Force Microscopy

Abstract A method to measure “on site” programmed charges in EEPROM devices is presented. Electrical Scanning Probe Microscopy (SPM) based techniques such as Electric Force Microscopy (EFM) and Scanning Kelvin Probe Microscopy (SKPM) are used to directly probe floating gate potentials. Both preparation and probing methods are discussed. Sample preparation to access floating gate/oxide interfaces at a few nanometers distance without discharging the gate proves to be the key problem, more than the probing technique itself. Applications are demonstrated on 128 kbit EEPROMs from ST Microelectronics and 64 kbit EEPROMs from Atmel.

Scanning Kelvin Force and Capacitance Microscopy Applications

1998 ◽  
Vol 4 (S2) ◽  
pp. 330-331
Author(s):  
R.J. Kline ◽  
J.F. Richards ◽  
P.E. Russell
Keyword(s):  
Integrated Circuits ◽  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Nanometer Scale ◽  
Kelvin Probe ◽  
Probe Microscopy ◽  
Kelvin Probe Microscopy ◽  
Small Capacitance ◽  
Force Monitoring ◽  
Work Functions

Scanning Probe Microscopy (SPM) is being developed as a possible solution to the problems inherent with analyzing the nanometer scale electronic properties of ULSI integrated circuits. Scanning Kelvin Probe Microscopy (SKPM) and Scanning Capacitance Microscopy (SCM) are both being developed to provide two dimensional dopant profiles of semiconductor devices. SKPM can also determine surface potentials, work functions, dielectric properties, and capacitance.SKPM is based on the concept of Kelvin probe oscillating capacitor work function measurements. The small capacitance area of the SKPM tip and the high resistance of the system produce difficulties in monitoring and minimizing the current in the system. SKPM solves this problem by utilizing the force monitoring capability of the SPM to minimize the Kelvin force instead of the current. An AC voltage applied to the cantilever produces a DC force and AC forces at the AC frequency and the first harmonic of the AC frequency.

Characterization of local electric properties of oxide materials using scanning probe microscopy techniques: A review

2018 ◽  
Vol 11 (05) ◽  
pp. 1830002 ◽  
Author(s):  
Wanheng Lu ◽  
Kaiyang Zeng
Keyword(s):  
Metal Oxides ◽  
Scanning Probe Microscopy ◽  
Electrostatic Force ◽  
Functional Materials ◽  
Electric Properties ◽  
Scanning Probe ◽  
Surface Charges ◽  
Kelvin Probe ◽  
Probe Microscopy ◽  
Force Microscopy

The structure-function relationship at the nanoscale is of great importance for many functional materials, such as metal oxides. To explore this relationship, Scanning Probe Microscopy (SPM)-based techniques are used as powerful and effective methods owing to their capability to investigate the local surface structures and multiple properties of the materials with a high spatial resolution. This paper gives an overview of SPM-based techniques for characterizing the electric properties of metal oxides with potential in the applications of electronics devices. Three types of SPM techniques, including conductive AFM ([Formula: see text]-AFM), Kelvin Probe Force Microscopy (KPFM), and Electrostatic Force Microscopy (EFM), are summarized with focus on their principles and advances in measuring the electronic transport, ionic dynamics, the work functions and the surface charges of oxides.

Determination of the Physical Properties of Oil Sands Components using Scanning Probe Microscopy

2015 ◽  
Vol 1754 ◽  
pp. 69-74
Author(s):  
Ravi Gaikwad ◽  
Tinu Abraham ◽  
Aharnish Hande ◽  
Fatemeh Bakhtiari ◽  
Siddhartha Das ◽  
...  
Keyword(s):  
Oil Sands ◽  
Structural Changes ◽  
Rational Approach ◽  
Kelvin Probe ◽  
Scanning Calorimetry ◽  
Probe Microscopy ◽  
Kelvin Probe Microscopy ◽  
Force Microscopy ◽  
Atomic Force

ABSTRACTAtomic force microscopy is employed to study the structural changes in the morphology and physical characteristics of asphaltene aggregates as a function of temperature. The exotic fractal structure obtained by evaporation-driven asphaltene aggregates shows an interesting dynamics for a large range of temperatures from 25°C to 80°C. The changes in the topography, surface potential and adhesion are unnoticeable until 70°C. However, a significant change in the dynamics and material properties is displayed in the range of 70°C - 80°C, during which the aspahltene aggregates acquire ‘liquid-like’ mobility and fuse together. This behaviour is attributed to the transition from the pure amorphous phase to a crystalline liquid phase which occurs at approximately 70°C as shown by using Differential Scanning Calorimetry (DSC). Additionally, the charged nature of asphaltenes and bitumen is also explored using kelvin probe microscopy. Such observations can lead to the development of a rational approach to the fundamental understanding of asphaltene aggregation dynamics and may help in devising novel techniques for the handling and separation of asphaltene aggregates using dielectrophoretic methods.

Developments in Using Scanning Probe Microscopy To Study Molecules on Surfaces — From Thin Films and Single-Molecule Conductivity to Drug–Living Cell Interactions

2006 ◽  
Vol 59 (6) ◽  
pp. 359 ◽  
Author(s):  
Pall Thordarson ◽  
Rob Atkin ◽  
Wouter H. J. Kalle ◽  
Gregory G. Warr ◽  
Filip Braet
Keyword(s):  
Single Molecule ◽  
Scanning Probe Microscopy ◽  
Cell Interactions ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Tunnelling Microscopy ◽  
Molecule Surface

Scanning probe microscopy (SPM) techniques, including atomic force microscopy (AFM) and scanning tunnelling microscopy (STM), have revolutionized our understanding of molecule–surface interactions. The high resolution and versatility of SPM techniques have helped elucidate the morphology of adsorbed surfactant layers, facilitated the study of electronically conductive single molecules and biomolecules connected to metal substrates, and allowed direct observation of real-time processes such as in situ DNA hybridization and drug–cell interactions. These examples illustrate the power that SPM possesses to study (bio)molecules on surfaces and will be discussed in depth in this review.

scholarly journals Electro-optical interfacial effects on a graphene/π-conjugated organic semiconductor hybrid system

2018 ◽  
Vol 9 ◽  
pp. 963-974 ◽  
Author(s):  
Karolline A S Araujo ◽  
Luiz A Cury ◽  
Matheus J S Matos ◽  
Thales F D Fernandes ◽  
Luiz G Cançado ◽  
...  
Keyword(s):  
Hybrid System ◽  
Organic Semiconductor ◽  
Optical Emission ◽  
Optical Excitation ◽  
Kelvin Probe ◽  
Self Assembled Monolayer ◽  
Semiconductor Interface ◽  
Probe Microscopy ◽  
Kelvin Probe Microscopy ◽  
Force Microscopy

The influence of graphene and retinoic acid (RA) – a π-conjugated organic semiconductor – interface on their hybrid system is investigated. The physical properties of the interface are assessed via scanning probe microscopy, optical spectroscopy (photoluminescence and Raman) and ab initio calculations. The graphene/RA interaction induces the formation of a well-organized π-conjugated self-assembled monolayer (SAM) at the interface. Such structural organization leads to the high optical emission efficiency of the RA SAM, even at room temperature. Additionally, photo-assisted electrical force microscopy, photo-assisted scanning Kelvin probe microscopy and Raman spectroscopy indicate a RA-induced graphene doping and photo-charge generation. Finally, the optical excitation of the RA monolayer generates surface potential changes on the hybrid system. In summary, interface-induced organized structures atop 2D materials may have an important impact on both design and operation of π-conjugated nanomaterial-based hybrid systems.

scholarly journals Исследование пленок диметилдиимида перилентетракарбоновой кислоты методами циклической термодесорбции и сканирующей зондовой микроскопии

2018 ◽  
Vol 60 (2) ◽  
pp. 255
Author(s):  
А.Е. Почтенный ◽  
А.Н. Лаппо ◽  
И.П. Ильюшонок
Keyword(s):  
Atomic Force Microscopy ◽  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Scanning Tunneling ◽  
Bandgap Width ◽  
Kelvin Probe ◽  
Tunneling Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Probe Spectroscopy

AbstractSome results of studying the direct-current (DC) conductivity of perylenetetracarboxylic acid dimethylimide films by cyclic oxygen thermal desorption are presented. The microscopic parameters of hopping electron transport over localized impurity and intrinsic states were determined. The bandgap width and the sign of major current carriers were determined by scanning probe microscopy methods (atomic force microscopy, scanning probe spectroscopy, and photoassisted Kelvin probe force microscopy). The possibility of the application of photoassisted scanning tunneling microscopy for the nanoscale phase analysis of photoconductive films is discussed.

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