Applications of Transmission Electron Microscopy and Secondary Ion Mass Spectrometry on Crystal Defect Analysis and Electronic Characterization of Advanced 512Mb DRAM

Abstract The capabilities of analytical transmission electron microscopy (TEM), such as high spatial resolution, micro-chemical analysis, etc., have led to an increasingly essential role for TEM-based analysis in process development, defect identification, yield enhancement, and root-cause failure analysis with the dynamic random access memory (DRAM) industry. In this article, several examples are reported to carry out the applications of TEM and secondary ion mass spectrometry on crystal defect analysis and electronic characteristics of advanced 512 Mb DRAMs.

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In Situ Correlative Microscopy Combining Transmission Electron Microscopy and Secondary Ion Mass Spectrometry

Microscopy and Microanalysis ◽

10.1017/s1431927618002398 ◽

2018 ◽

Vol 24 (S1) ◽

pp. 380-381 ◽

Cited By ~ 1

Author(s):

Santhana Eswara ◽

Lluis Yedra ◽

Alisa Pshenova ◽

Varun Sarbada ◽

Jean-Nicolas Audinot ◽

...

Keyword(s):

Electron Microscopy ◽

Mass Spectrometry ◽

Transmission Electron Microscopy ◽

Secondary Ion Mass Spectrometry ◽

Correlative Microscopy ◽

Transmission Electron ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Study of the microstructure of IC interconnect metallisations using analytical transmission electron microscopy and secondary ion mass spectrometry

Proceedings of the 7th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis ◽

10.1109/esref.1996.888195 ◽

2005 ◽

Author(s):

P. Cosemans ◽

M. D'Olieslaeger ◽

W. de Ceuninck ◽

L. de Schepper ◽

L. Stals

Keyword(s):

Electron Microscopy ◽

Mass Spectrometry ◽

Transmission Electron Microscopy ◽

Secondary Ion Mass Spectrometry ◽

Analytical Transmission Electron Microscopy ◽

Transmission Electron ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Incorporation of 13C labelled shoot residues in Lumbricus terrestris casts: A combination of transmission electron microscopy and nanoscale secondary ion mass spectrometry

Soil Biology and Biochemistry ◽

10.1016/j.soilbio.2015.10.018 ◽

2016 ◽

Vol 93 ◽

pp. 8-16 ◽

Cited By ~ 15

Author(s):

A. Vidal ◽

L. Remusat ◽

F. Watteau ◽

S. Derenne ◽

K. Quenea

Keyword(s):

Electron Microscopy ◽

Mass Spectrometry ◽

Transmission Electron Microscopy ◽

Secondary Ion Mass Spectrometry ◽

Lumbricus Terrestris ◽

Transmission Electron ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Characterisation of amorphous silica in air-oxidised Ti3SiC2 at 500–1000°C using secondary-ion mass spectrometry, nuclear magnetic resonance and transmission electron microscopy

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2010.02.005 ◽

2010 ◽

Vol 121 (3) ◽

pp. 453-458 ◽

Cited By ~ 5

Author(s):

W.K. Pang ◽

I.M. Low ◽

J.V. Hanna

Keyword(s):

Electron Microscopy ◽

Mass Spectrometry ◽

Transmission Electron Microscopy ◽

Nuclear Magnetic Resonance ◽

Magnetic Resonance ◽

Amorphous Silica ◽

Secondary Ion Mass Spectrometry ◽

Transmission Electron ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Study of the microstructure of IC interconnect metallisations using analytical transmission electron microscopy and secondary ion mass spectrometry

Microelectronics Reliability ◽

10.1016/0026-2714(96)00177-1 ◽

1996 ◽

Vol 36 (11-12) ◽

pp. 1699-1702 ◽

Cited By ~ 2

Author(s):

P. Cosemans ◽

M. D'Olieslaeger ◽

W. De Ceuninck ◽

L. De Schepper ◽

L. Stals

Keyword(s):

Electron Microscopy ◽

Mass Spectrometry ◽

Transmission Electron Microscopy ◽

Secondary Ion Mass Spectrometry ◽

Analytical Transmission Electron Microscopy ◽

Transmission Electron ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Determination of the Effects of Hydrothermal Alteration on Silicate Stardust with Secondary Ion Mass Spectrometry and Transmission Electron Microscopy

Microscopy and Microanalysis ◽

10.1017/s1431927614010228 ◽

2014 ◽

Vol 20 (S3) ◽

pp. 1698-1699

Author(s):

Rhonda M. Stroud ◽

Bradley De Gregorio ◽

Jemma Davidson ◽

Larry Nittler ◽

M. Conel ◽

...

Keyword(s):

Electron Microscopy ◽

Mass Spectrometry ◽

Transmission Electron Microscopy ◽

Hydrothermal Alteration ◽

Secondary Ion Mass Spectrometry ◽

Transmission Electron ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Secondary ion mass spectrometry and scanning transmission and transmission electron microscopy studies of the effects of reactive elements on nickel oxidation

Surface and Coatings Technology ◽

10.1016/0257-8972(92)90213-t ◽

1992 ◽

Vol 51 (1-3) ◽

pp. 45-51 ◽

Cited By ~ 9

Author(s):

P.J. George ◽

M.J. Bennett ◽

H.E. Bishop ◽

C.M. Cotell ◽

A.J. Garratt-Reed

Keyword(s):

Electron Microscopy ◽

Mass Spectrometry ◽

Transmission Electron Microscopy ◽

Secondary Ion Mass Spectrometry ◽

Reactive Elements ◽

Nickel Oxidation ◽

Transmission Electron ◽

Ion Mass Spectrometry ◽

Scanning Transmission ◽

Secondary Ion

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The role of ultra-thin carbon barrier layers for fabrication of La/B4C interferential mirrors: Study by time-of-flight secondary ion mass spectrometry and high-resolution transmission electron microscopy

Thin Solid Films ◽

10.1016/j.tsf.2015.01.025 ◽

2015 ◽

Vol 577 ◽

pp. 11-16 ◽

Cited By ~ 11

Author(s):

M.N. Drozdov ◽

Y.N. Drozdov ◽

N.I. Chkhalo ◽

V.N. Polkovnikov ◽

N.N. Salashchenko ◽

...

Keyword(s):

Electron Microscopy ◽

Mass Spectrometry ◽

Transmission Electron Microscopy ◽

High Resolution ◽

Secondary Ion Mass Spectrometry ◽

Barrier Layers ◽

Transmission Electron ◽

Thin Carbon ◽

Secondary Ion

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Cellular and subcellular localization of chromium in the crab Liocarcinus puber (Brachyrhyncha) by transmission electron microscopy, secondary ion mass spectrometry and electron microprobe analysis

BioMetals ◽

10.1007/bf00143384 ◽

1995 ◽

Vol 8 (3) ◽

Cited By ~ 1

Author(s):

Colette Chassard-Bouchaud ◽

Michelle Hubert ◽

Fran�oise Escaig ◽

Ren�Louis Inglebert

Keyword(s):

Electron Microscopy ◽

Mass Spectrometry ◽

Transmission Electron Microscopy ◽

Subcellular Localization ◽

Electron Microprobe ◽

Microprobe Analysis ◽

Electron Microprobe Analysis ◽

Secondary Ion Mass Spectrometry ◽

Transmission Electron ◽

Secondary Ion

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Detection of Amorphous Silica in Air-Oxidized Ti3SiC2 at 500–1000°C by NMR and SIMS

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.434-435.169 ◽

2010 ◽

Vol 434-435 ◽

pp. 169-172 ◽

Cited By ~ 1

Author(s):

Wei Kong Pang ◽

It Meng Low ◽

J.V. Hanna

Keyword(s):

Electron Microscopy ◽

Mass Spectrometry ◽

Transmission Electron Microscopy ◽

Amorphous Silica ◽

Direct Evidence ◽

Secondary Ion Mass Spectrometry ◽

Amorphous Sio2 ◽

Transmission Electron ◽

First Time ◽

Secondary Ion

The use of secondary-ion mass spectrometry (SIMS), nuclear magnetic resonance (NMR) and transmission electron microscopy (TEM) to detect the existence of amorphous silica in Ti3SiC2 oxidised at 500–1000°C is described. The formation of an amorphous SiO2 layer and its growth in thickness with temperature was monitored using dynamic SIMS. Results of NMR and TEM verify for the first time the direct evidence of amorphous silica formation during the oxidation of Ti3SiC2 at 1000°C.

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