Low Angle Annular Dark Field Scanning Transmission Electron Microscopy Analysis of Phase Change Material

2021 ◽  
Author(s):  
J. Li ◽  
K. Brew ◽  
K. Cheng ◽  
V. Chan ◽  
N. Arnold ◽  
...  
Keyword(s):  
Rapid Development ◽  
Dark Field ◽  
Transmission Electron Microscopy Analysis ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Before And After ◽  
Annular Dark Field ◽  
Electron Microscopy Analysis ◽  
Microscopy Analysis ◽  
Change Material

Abstract The continuously growing demands in high-density memories drive the rapid development of advanced memory technologies. In this work, we investigate the mushroom type PCM cells based on Ge2Sb2Te5 at nanoscale by low angle annular dark field (LAADF) STEM imaging technique as well as energy dispersive X-ray spectroscopy (EDX) to study the changes in microstructure and elemental distributions in PCM mushroom cells before and after SET and RESET conditions. We describe the microscope settings used for LAADF image formation to reveal the amorphous dome in RESET device and discuss the application example in failure analysis of PCM test device.

scholarly journals (Al,Mg)3La: a new phase in the Mg–Al–La system

2018 ◽  
Vol 74 (4) ◽  
pp. 370-375 ◽  
Author(s):  
Charlotte Wong ◽  
Mark J. Styles ◽  
Suming Zhu ◽  
Dong Qiu ◽  
Stuart D. McDonald ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Powder Diffraction ◽  
Dark Field ◽  
Transmission Electron Microscopy Analysis ◽  
X Ray ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Annular Dark Field ◽  
Electron Microscopy Analysis

During an investigation of the Mg-rich end of the Mg–Al–La system, a new ternary phase with the composition of (Al,Mg)3La was identified. The crystal structure of this phase was determined by conventional X-ray powder diffraction and transmission electron microscopy analysis and refined using high-resolution X-ray powder diffraction. The (Al,Mg)3La phase is found to have an orthorhombic structure with a space group of C2221 and lattice parameters of a = 4.3365 (1) Å, b = 18.8674 (4) Å and c = 4.4242 (1) Å, which is distinctly different from the binary Al3La phase (P63/mmc). The resolved structure of the (Al,Mg)3La phase is further verified by high-angle annular dark-field scanning transmission electron microscopy.

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