Recent Developments for the Characterization of Crystals and Defects at the Nanoscale using On-Axis TKD in SEM
Keyword(s):
Abstract The development of advanced nanomaterials and nanodevices is dependent on the availability of powerful and reliable characterization techniques. In this context, we developed hardware and software capabilities to help push the spatial resolution limit during orientation mapping in a Scanning Electron Microscope (SEM).
1973 ◽
Vol 31
◽
pp. 44-45
2018 ◽
Vol 4
(6)
◽
pp. 301-312
2000 ◽
2009 ◽
Vol 149
(39-40)
◽
pp. 1608-1610
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2021 ◽
Vol 25
(1)
◽
pp. 202
Keyword(s):
Morphological Characterization of Fabricated Aluminum Interdigitated Electrodes on Silicon Substrate
2015 ◽
Vol 1109
◽
pp. 381-384
2011 ◽
Vol 82
(10)
◽
pp. 106105
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