AbstractPlasma-assisted chemical vapor deposition (PACVD) is used extensively to coat planar (2-dimensional) substrates. In principle, the technique can be used to deposit coatings on 3-dinensional objects. However, extending PACVD to coat 3-dimensional objects uniformly requires careful control of the plasma, substrate temperature, and reactant concentrations over a large volume. A novel low-temperature radio frequency PACVD reactor design was developed to deposit coatings uniformly and reproducibly on 3-dimensional metallic substrates. The design features a temperature-controlled reaction chamber fitted with one or more rf-driven electrodes to generate uniform, large-volume plasma. The reactor was used to develop a series of silicon carbide coatings, which were deposited at or below 500°C. The coatings contain SiC and varying amounts of free silicon and/or amorphous carbon (diamond-like carbon), depending on reagent gas composition and reactor operating parameters. The coatings significantly reduced wear on stainless steel samples in ball-on-disk and abrasive wear tests and provided oxidation protection to molybdenum and titanium alloy.
LOW-TEMPERATURE (<300ºC) LOW-STRESS SILICON CARBIDE SURFACE MICROMACHINING FABRICATION TECHNOLOGY
