scholarly journals Analysis on Characteristics of ZnO Surface Acoustic Wave with and without Micro-Structures

Micromachines ◽  
2019 ◽  
Vol 10 (7) ◽  
pp. 434 ◽  
Author(s):  
Huang ◽  
Chiang ◽  
Wu ◽  
Lin ◽  
Shen
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Digital Signal ◽  
Rf Magnetron Sputtering ◽  
Manufacturing Processes ◽  
Micro Machining ◽  
Zno Thin Film ◽  
Measurement Signal ◽  
Micro Structures

In this paper, we fabricate a surface acoustic wave (SAW) device with micro-structures on a zinc oxide (ZnO) thin film and measure its signal response. The manufacturing processes of the SAW device include the fabrication of micro-structures of a SAW element and its interdigital transducer by silicon micro-machining and the fabrication of a thin film of ZnO by RF magnetron sputtering. We, then, measure the SAW properties. This research investigates the properties of sputtered thin films for various amounts of O2/(Ar + O2) using Zn and ZnO targets. Regardless of target, the growth rate of the ZnO thin film decreases as the oxygen content increases. When the SAW is sputtered ZnO thin film using 30% oxygen, the digital signal of the SAW has better performance. The measurement signal of the SAW with micro-structures is similar to that without micro-structures.

Bendable ZnO thin film surface acoustic wave devices on polyethylene terephthalate substrate

2014 ◽  
Vol 104 (21) ◽  
pp. 213504 ◽  
Author(s):  
Xingli He ◽  
Hongwei Guo ◽  
Jinkai Chen ◽  
Wenbo Wang ◽  
Weipeng Xuan ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Polyethylene Terephthalate ◽  
Film Surface ◽  
Zno Thin Film ◽  
Thin Film Surface ◽  
Acoustic Wave Devices ◽  
Polyethylene Terephthalate Substrate

Growth of ZnO thin film and its surface acoustic wave properties

2015 ◽  
Vol 32 (1) ◽  
pp. 17
Author(s):  
Jingting Luo ◽  
Xin Zhong ◽  
Maodong Zhu ◽  
Di Gu ◽  
Pengfei Ke ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Zno Thin Film ◽  
Wave Properties

Development of flexible ZnO thin film surface acoustic wave strain sensors on ultrathin glass substrates

2015 ◽  
Vol 25 (11) ◽  
pp. 115005 ◽  
Author(s):  
Jinkai Chen ◽  
Hongwei Guo ◽  
Xingli He ◽  
Wenbo Wang ◽  
Weipeng Xuan ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Film Surface ◽  
Strain Sensors ◽  
Zno Thin Film ◽  
Glass Substrates ◽  
Thin Film Surface

Synthesis of Surface Acoustic Wave Filter with Al/ZnO Thin Film Deposited on Silicon Wafer

2005 ◽  
Vol 475-479 ◽  
pp. 3771-3774
Author(s):  
F. Pan ◽  
J.J. Chen ◽  
Fei Zeng ◽  
Y. Gao ◽  
D.M. Li
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Silicon Wafer ◽  
Zno Films ◽  
Zno Thin Film ◽  
Fine Grain ◽  
Surface Flatness ◽  
Wave Filter ◽  
Si Wafer

ZnO thin film, as a promising piezoelectric material, possesses unique electrical, acoustical, and optical properties. In this paper, Al/ZnO thin film was deposited on Si wafer by magnetron sputtering. Highly oriented, dense, and fine-grain polycrystalline ZnO films with excellent surface flatness and high resistivities have been obtained, when the sputtered gas pressure was 0.9 Pa, the temperature was 200 °C and the Ar-to-O2 ratio was 1:3. A 780MHz surface acoustic wave filter (SAWF) has been successfully fabricated using the Al/ZnO film on silicon wafer.

Bendable transparent ZnO thin film surface acoustic wave strain sensors on ultra-thin flexible glass substrates

2014 ◽  
Vol 2 (43) ◽  
pp. 9109-9114 ◽  
Author(s):  
Jinkai Chen ◽  
Xingli He ◽  
Wenbo Wang ◽  
Weipeng Xuan ◽  
Jian Zhou ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Film Surface ◽  
Strain Sensors ◽  
Zno Thin Film ◽  
Thin Glass ◽  
Glass Substrates ◽  
Thin Film Surface ◽  
Wide Range

We demonstrated the flexible SAW sensors based on ultra-thin glass, which have the tremendous capability to detect strains in a very wide range (∼5 times larger than others) with a sensitivity of ∼34.7 Hz με−1.

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