Fabrication of 945 MHz Band Film Surface Acoustic Wave Resonators Using ZnO Thin Film with Si Substrate

2007 ◽  
Author(s):  
E. Ntagwirumugara ◽  
T. Gryba ◽  
V. Zhang ◽  
J. Carlier ◽  
J.E. Lefebvre
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Film Surface ◽  
Zno Thin Film ◽  
Si Substrate ◽  
Acoustic Wave Resonators

Bendable ZnO thin film surface acoustic wave devices on polyethylene terephthalate substrate

2014 ◽  
Vol 104 (21) ◽  
pp. 213504 ◽  
Author(s):  
Xingli He ◽  
Hongwei Guo ◽  
Jinkai Chen ◽  
Wenbo Wang ◽  
Weipeng Xuan ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Polyethylene Terephthalate ◽  
Film Surface ◽  
Zno Thin Film ◽  
Thin Film Surface ◽  
Acoustic Wave Devices ◽  
Polyethylene Terephthalate Substrate

Development of flexible ZnO thin film surface acoustic wave strain sensors on ultrathin glass substrates

2015 ◽  
Vol 25 (11) ◽  
pp. 115005 ◽  
Author(s):  
Jinkai Chen ◽  
Hongwei Guo ◽  
Xingli He ◽  
Wenbo Wang ◽  
Weipeng Xuan ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Film Surface ◽  
Strain Sensors ◽  
Zno Thin Film ◽  
Glass Substrates ◽  
Thin Film Surface

Bendable transparent ZnO thin film surface acoustic wave strain sensors on ultra-thin flexible glass substrates

2014 ◽  
Vol 2 (43) ◽  
pp. 9109-9114 ◽  
Author(s):  
Jinkai Chen ◽  
Xingli He ◽  
Wenbo Wang ◽  
Weipeng Xuan ◽  
Jian Zhou ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Film Surface ◽  
Strain Sensors ◽  
Zno Thin Film ◽  
Thin Glass ◽  
Glass Substrates ◽  
Thin Film Surface ◽  
Wide Range

We demonstrated the flexible SAW sensors based on ultra-thin glass, which have the tremendous capability to detect strains in a very wide range (∼5 times larger than others) with a sensitivity of ∼34.7 Hz με−1.

Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators

2019 ◽  
Vol 126 (7) ◽  
pp. 075106 ◽  
Author(s):  
Nicolas Kurz ◽  
Anli Ding ◽  
Daniel F. Urban ◽  
Yuan Lu ◽  
Lutz Kirste ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Experimental Determination ◽  
Surface Acoustic Wave ◽  
Acoustic Properties ◽  
Acoustic Wave Resonators
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