Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method
Keyword(s):
2011 ◽
Vol 5
(5)
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pp. 861-869
Keyword(s):
1988 ◽
Vol 52
(2)
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pp. 270-274
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Keyword(s):
Keyword(s):
1991 ◽
Vol 57
(542)
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pp. 3491-3498
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2007 ◽
Vol 21
(23n24)
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pp. 4219-4224
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1970 ◽
Vol 43
(4)
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pp. 1006-1010
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