scholarly journals Equivalent Circuit Model of an Optomechanical MEMS Electric Field Strength Sensor

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 712
Author(s):  
Andreas Kainz ◽  
Wilfried Hortschitz ◽  
Harald Steiner ◽  
Michael Stifter ◽  
Franz Keplinger

We present a simple equivalent circuit model for the transfer function of an optomechanical MEMS transducer capable of distortion-free electric field strength measurements. This model allows not only to qualitatively understand the characteristics of the transducer but also takes into account parasitic effects and material properties. Such parasitic effects have been observed while evaluating the first results of electric field measurements performed with the sensor. The model helped to identify and diminish these parasitic effects.

1987 ◽  
Vol 14 (4) ◽  
pp. 435-438 ◽  
Author(s):  
L. P. Block ◽  
C.-G. Fälthammar ◽  
P.-A. Lindqvist ◽  
G. Marklund ◽  
F. S. Mozer ◽  
...  

2012 ◽  
Vol 717-720 ◽  
pp. 1097-1100 ◽  
Author(s):  
Shiro Hino ◽  
Naruhisa Miura ◽  
Akihiko Furukawa ◽  
Shoyu Watanabe ◽  
Yukiyasu Nakao ◽  
...  

High speed switching is desired to reduce switching losses of SiC-MOSFETs. In order to realize SiC-MOSFETs capable of high speed switching, we numerically evaluated the electric field induced in SiC-MOSFETs during switching using an equivalent circuit model. Based on the evaluation, we designed a SiC-MOSFET, which successfully demonstrated high speed switching with a dV/dt of over 70 V/ns.


2015 ◽  
Vol 15 (3) ◽  
pp. 1680-1689 ◽  
Author(s):  
Mitsunori Ozaki ◽  
Satoshi Yagitani ◽  
Ken Takahashi ◽  
Tomohiko Imacih ◽  
Hiroki Koji ◽  
...  

2016 ◽  
Vol 136 (10) ◽  
pp. 1420-1421
Author(s):  
Yusuke Tanaka ◽  
Yuji Nagaoka ◽  
Hyeon-Gu Jeon ◽  
Masaharu Fujii ◽  
Haruo Ihori

2012 ◽  
Vol 132 (1) ◽  
pp. 1-9 ◽  
Author(s):  
Satoshi Maruyama ◽  
Muneki Nakada ◽  
Makoto Mita ◽  
Takuya Takahashi ◽  
Hiroyuki Fujita ◽  
...  

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