scholarly journals Flame-Spray-Made Undoped Zinc Oxide Films for Gas Sensing Applications

Sensors ◽  
2010 ◽  
Vol 10 (8) ◽  
pp. 7863-7873 ◽  
Author(s):  
Nittaya Tamaekong ◽  
Chaikarn Liewhiran ◽  
Anurat Wisitsoraat ◽  
Sukon Phanichphant
2016 ◽  
Author(s):  
Chetna ◽  
Shani Kumar ◽  
A. Garg ◽  
A. Chowdhuri ◽  
V. Dhingra ◽  
...  

1993 ◽  
Vol 14 (1-3) ◽  
pp. 594-595 ◽  
Author(s):  
Tsutomu Yamazaki ◽  
Satoshi Wada ◽  
Tatsuo Noma ◽  
Takeyuki Suzuki

Author(s):  
T. A. Emma ◽  
M. P. Singh

Optical quality zinc oxide films have been characterized using reflection electron diffraction (RED), replication electron microscopy (REM), scanning electron microscopy (SEM), and X-ray diffraction (XRD). Significant microstructural differences were observed between rf sputtered films and planar magnetron rf sputtered films. Piezoelectric materials have been attractive for applications to integrated optics since they provide an active medium for signal processing. Among the desirable physical characteristics of sputtered ZnO films used for this and related applications are a highly preferred crystallographic texture and relatively smooth surfaces. It has been found that these characteristics are very sensitive to the type and condition of the substrate and to the several sputtering parameters: target, rf power, gas composition and substrate temperature.


2009 ◽  
Vol 129 (11) ◽  
pp. 1981-1984
Author(s):  
Yuki Ueno ◽  
Takanori Aoki ◽  
Akio Suzuki ◽  
Tatsuhiko Matsushita ◽  
Masahiro Okuda

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