On-wafer monitoring and control of ion energy distribution for damage minimization in atomic layer etching processes

2020 ◽  
Vol 59 (SJ) ◽  
pp. SJJC01 ◽  
Author(s):  
A. Hirata ◽  
M. Fukasawa ◽  
K. Kugimiya ◽  
K. Nagaoka ◽  
K. Karahashi ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Atomic Layer ◽  
Monitoring And Control ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
And Control ◽  
Atomic Layer Etching

The ion energy distribution in front of a negative wall

1992 ◽  
Vol 25 (4) ◽  
pp. 620-633 ◽  
Author(s):  
K -U Reimann ◽  
U Ehlemann ◽  
K Wiesemann
Keyword(s):  
Energy Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution

Ion Energy Distribution Skew Control Using Phase-Locked Harmonic RF Bias Drive

2014 ◽  
Vol 42 (7) ◽  
pp. 1880-1893 ◽  
Author(s):  
David J. Coumou ◽  
David Hamilton Clark ◽  
Theresa Kummerer ◽  
Michael Hopkins ◽  
Donal Sullivan ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution

Ion energy distribution in triode ion plating

Vacuum ◽  
1984 ◽  
Vol 34 (8-9) ◽  
pp. 765-769 ◽  
Author(s):  
P Saulnier ◽  
A Debhi ◽  
J Machet
Keyword(s):  
Energy Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Ion Plating
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