Insulator-to-semiconductor conversion of solution-processed ultra-wide bandgap amorphous gallium oxide via hydrogen annealing
Keyword(s):
Abstract Developing semiconducting solution-processed ultra-wide bandgap (UWB) amorphous oxide semiconductor (AOS) is an emerging area of research interest. However, obtaining electrical conduction on it is quite challenging. Here, we demonstrate the insulator-to-semiconductor conversion of solution-processed a-Ga2Ox (Eg~4.8 eV) through hydrogen annealing. The successful conversion was reflected by the switching thin-film transistor (TFT) with μsat of 10-2 cm2/Vs. We showed that H incorporated after hydrogen annealing acts as a shallow donor which increased the carrier concentration and shifted the EF closer to the CBM.
2020 ◽
Vol 21
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pp. 235-248
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2019 ◽
Vol 625
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pp. 012002
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2014 ◽
Vol 18
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pp. 53-61
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2018 ◽
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pp. 1800198
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2020 ◽
Vol 2
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pp. 405-408
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