Research progress of high-precision surface metrology of a K-B mirror

2020 ◽  
Vol 13 (4) ◽  
pp. 660-675
Author(s):  
ZHANG Shuai ◽  
◽  
◽  
HOU Xi ◽  
◽  
...  
Keyword(s):  
High Precision ◽  
Research Progress ◽  
Surface Metrology

Wafer Scale Factories Using Assembled MEMS Robots

2010 ◽  
Author(s):  
Rakesh Murthy ◽  
Dan O. Popa
Keyword(s):  
High Precision ◽  
Recent Progress ◽  
Research Progress ◽  
Dexterous Manipulation ◽  
Nano Indentation ◽  
Work Volume ◽  
Precision Evaluation ◽  
Sem Imaging ◽  
Laser Interferometers ◽  
Application Specific

This paper presents recent research progress in the manufacturing of MEMS based robotic positioning technology. The goal is to configure a nanofactory consisting of multiple microrobots that combine high precision with high throughput along with other application-specific requirements such as strength, dexterity, and work volume. This requires design to satisfy part mobility and dexterous manipulation with high precision. The first microrobot called the Articulated Four Axes Microrobot (AFAM) is a 3D dexterous micromanipulator robot, and we describe nano indentation experiments using AFM tips mounted on the microrobot. By combining positioning data obtained using laser interferometers and SEM imaging of nano indentation data, precision metrics such as accuracy, repeatability and resolution of the AFAM robot are determined. Preliminary reliability findings are presented. The second robot type is the ARRIpede microcrawler, and we present recent progress in microrobot precision evaluation including motion resolution and repeatability. Using these two microrobots as basic positioning and manipulation units, a nanoassembly module concept for hybrid nano assembly applications is proposed. In this paper we present recent progress in fabricating, assembling and evaluating the basic microfactory modules.

scholarly journals High precision surface metrology of x-ray optics with an interferometric microscope

2013 ◽  
Author(s):  
Ian Lacey ◽  
Nikolay A. Artemiev ◽  
Wayne R. McKinney ◽  
Daniel J. Merthe ◽  
Valeriy V. Yashchuk
Keyword(s):  
High Precision ◽  
Surface Metrology ◽  
Ray Optics ◽  
X Ray

Research progress of high precision micro structure glass optical element array molding technology

2020 ◽  
Vol 28 (9) ◽  
pp. 1967-1985
Author(s):  
Cheng-song SHU ◽  
◽  
Hao DONG ◽  
Shao-hui YIN ◽  
Norio YAMATO ◽  
...  
Keyword(s):  
High Precision ◽  
Optical Element ◽  
Research Progress ◽  
Micro Structure ◽  
Element Array

Research Progress on Application of Magnetic Suspension Balance in Basic Physical Properties Measurement

2011 ◽  
Vol 301-303 ◽  
pp. 1568-1573 ◽  
Author(s):  
Yong Shen ◽  
Yi Zhang ◽  
Yong Chen Song ◽  
Ying Hua Guan ◽  
Wei Wei Jian ◽  
...  
Keyword(s):  
Mass Transfer ◽  
Diffusion Coefficient ◽  
Interfacial Tension ◽  
Physical Properties ◽  
High Precision ◽  
Specific Volume ◽  
Magnetic Suspension ◽  
Research Progress ◽  
Fluid Viscosity ◽  
Magnetic Suspension Balance

Basic physical properties of solutions with high precision are highly needed. The conventional devices can’t meet this demand. However, the magnetic suspension balance (MSB) could solve this problem. This paper summarizes the applications of MSB on the basic physical properties such as density, solubility, diffusion coefficient, adsorption, mass transfer, interfacial tension, specific volume, and so on. There is also a brief introduction about the measurement on fluid viscosity by the MSB after renovation.

scholarly journals Research Progress of High-precision Patterns by Directly Inkjet Printing

2012 ◽  
Vol 70 (18) ◽  
pp. 1889 ◽  
Author(s):  
Minxuan Kuang ◽  
Jingxia Wang ◽  
Libin Wang ◽  
Yanlin Song
Keyword(s):  
High Precision ◽  
Inkjet Printing ◽  
Research Progress

scholarly journals Narrow-Linewidth Laser Linewidth Measurement Technology

2021 ◽  
Vol 9 ◽  
Author(s):  
Zhenxu Bai ◽  
Zhongan Zhao ◽  
Yaoyao Qi ◽  
Jie Ding ◽  
Sensen Li ◽  
...  
Keyword(s):  
High Precision ◽  
Spectral Resolution ◽  
Dynamic Range ◽  
Rapid Development ◽  
Research Progress ◽  
Measurement Technology ◽  
Laser Linewidth ◽  
Narrow Linewidth ◽  
High Precision Measurement ◽  
Linewidth Measurement

A narrow-linewidth laser with excellent temporal coherence is an important light source for microphysics, space detection, and high-precision measurement. An ultranarrow-linewidth output with a linewidth as narrow as subhertz has been generated with a theoretical coherence length over millions of kilometers. Traditional grating spectrum measurement technology has a wide wavelength scanning range and an extended dynamic range, but the spectral resolution can only reach the gigahertz level. The spectral resolution of a high-precision Fabry–Pérot interferometer can only reach the megahertz level. With the continuous improvement of laser coherence, the requirements for laser linewidth measurement technology are increasing, which also promotes the rapid development of narrow-linewidth lasers and their applications. In this article, narrow-linewidth measurement methods and their research progress are reviewed to provide a reference for researchers engaged in the development, measurement, and applications of narrow-linewidth lasers.

Recent Advances in Ultraprecision Diamond Turning of Non-Rotationally Symmetric Optical Surfaces

2011 ◽  
Vol 110-116 ◽  
pp. 3600-3607
Author(s):  
Mei Chen Liu ◽  
Jie Qiong Lin ◽  
Xiao Qin Zhou
Keyword(s):  
High Precision ◽  
Cost Effective ◽  
Diamond Turning ◽  
Machining Process ◽  
Superior Performance ◽  
Research Progress ◽  
Precision Machining ◽  
Machining Processes ◽  
Optical Surfaces ◽  
Rotationally Symmetric

Firstly, the superior performance and industrial application prospects of non-rotationally symmetric (NRS) optical surfaces are detailed. Secondly, those high precision machining processes to generate NRS optical surfaces are overviewed, it’s been stressed that fast tool servo (FTS) based diamond turning has been the most promising, cost-effective, and high precision machining process to generate NRS surfaces. Finally, the recent research progress in FTS based diamond turning of NRS optical surfaces is remarked, both the tool trajectory generation and the FTS actuation techniques are discussed, the limitations of the existing researches are disclosed, and then the academic and technological researches to be urgently carried out are suggested.

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