Thermal Property Evaluation of a Silicon Nitride Thin-Film Using the Dual-Wavelength Pump-Probe Technique

2019 ◽  
Vol 29 (9) ◽  
pp. 547-552 ◽  
Author(s):  
Yun Young Kim
2017 ◽  
Vol 95 ◽  
pp. 100-104 ◽  
Author(s):  
Anil Kumar ◽  
Rajesh Punia ◽  
Arun K. Gupta ◽  
Devendra Mohan ◽  
Kirti Kapoor

APL Photonics ◽  
2018 ◽  
Vol 3 (1) ◽  
pp. 016101 ◽  
Author(s):  
Mirco Kolarczik ◽  
Christian Ulbrich ◽  
Pieter Geiregat ◽  
Yunpeng Zhu ◽  
Laxmi Kishore Sagar ◽  
...  

1998 ◽  
Vol 508 ◽  
Author(s):  
A. Izumi ◽  
T. Ichise ◽  
H. Matsumura

AbstractSilicon nitride films prepared by low temperatures are widely applicable as gate insulator films of thin film transistors of liquid crystal displays. In this work, silicon nitride films are formed around 300 °C by deposition and direct nitridation methods in a catalytic chemical vapor deposition system. The properties of the silicon nitride films are investigated. It is found that, 1) the breakdown electric field is over 9MV/cm, 2) the surface state density is about 1011cm−2eV−1 are observed in the deposition films. These result shows the usefulness of the catalytic chemical vapor deposition silicon nitride films as gate insulator material for thin film transistors.


2011 ◽  
Author(s):  
Lirong Ge ◽  
Min Shui ◽  
Xiao Jin ◽  
Zhongguo Li ◽  
Yinglin Song

1996 ◽  
Vol 43 (9) ◽  
pp. 1592-1601 ◽  
Author(s):  
S.J. Bijlsma ◽  
H. van Kranenburg ◽  
K.J.B.M. Nieuwesteeg ◽  
M.G. Pitt ◽  
J.F. Verweij

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