scholarly journals Low-dose patterning of platinum nanoclusters on carbon nanotubes by focused-electron-beam-induced deposition as studied by TEM

2013 ◽  
Vol 4 ◽  
pp. 77-86 ◽  
Author(s):  
Xiaoxing Ke ◽  
Carla Bittencourt ◽  
Sara Bals ◽  
Gustaaf Van Tendeloo
Keyword(s):  
Carbon Nanotubes ◽  
Electron Beam ◽  
Low Dose ◽  
Direct Write ◽  
Pt Nanoclusters ◽  
Transmission Electron ◽  
High Resolution Tem ◽  
Physical Deposition ◽  
Electron Beam Induced Deposition ◽  
Beam Parameters

Focused-electron-beam-induced deposition (FEBID) is used as a direct-write approach to decorate ultrasmall Pt nanoclusters on carbon nanotubes at selected sites in a straightforward maskless manner. The as-deposited nanostructures are studied by transmission electron microscopy (TEM) in 2D and 3D, demonstrating that the Pt nanoclusters are well-dispersed, covering the selected areas of the CNT surface completely. The ability of FEBID to graft nanoclusters on multiple sides, through an electron-transparent target within one step, is unique as a physical deposition method. Using high-resolution TEM we have shown that the CNT structure can be well preserved thanks to the low dose used in FEBID. By tuning the electron-beam parameters, the density and distribution of the nanoclusters can be controlled. The purity of as-deposited nanoclusters can be improved by low-energy electron irradiation at room temperature.

scholarly journals A novel copper precursor for electron beam induced deposition

2018 ◽  
Vol 9 ◽  
pp. 1220-1227 ◽  
Author(s):  
Caspar Haverkamp ◽  
George Sarau ◽  
Mikhail N Polyakov ◽  
Ivo Utke ◽  
Marcos V Puydinger dos Santos ◽  
...  
Keyword(s):  
Electron Beam ◽  
Optical Transmission ◽  
Pure Copper ◽  
Dielectric Behavior ◽  
Copper Oxidation ◽  
Transmission Electron ◽  
Sum Formula ◽  
Electron Beam Induced Deposition ◽  
High Degree ◽  
Good Agreement

A fluorine free copper precursor, Cu(tbaoac)2 with the chemical sum formula CuC16O6H26 is introduced for focused electron beam induced deposition (FEBID). FEBID with 15 keV and 7 nA results in deposits with an atomic composition of Cu:O:C of approximately 1:1:2. Transmission electron microscopy proved that pure copper nanocrystals with sizes of up to around 15 nm were dispersed inside the carbonaceous matrix. Raman investigations revealed a high degree of amorphization of the carbonaceous matrix and showed hints for partial copper oxidation taking place selectively on the surfaces of the deposits. Optical transmission/reflection measurements of deposited pads showed a dielectric behavior of the material in the optical spectral range. The general behavior of the permittivity could be described by applying the Maxwell–Garnett mixing model to amorphous carbon and copper. The dielectric function measured from deposited pads was used to simulate the optical response of tip arrays fabricated out of the same precursor and showed good agreement with measurements. This paves the way for future plasmonic applications with copper-FEBID.

Growth and Characterization of Cobalt-filled Carbon Nanotubes Prepared by a Simple Catalytic Method

2003 ◽  
Vol 776 ◽  
Author(s):  
Xicheng Ma ◽  
Yuanhua Cai ◽  
Xia Li ◽  
Ning Lun ◽  
Shulin Wen
Keyword(s):  
Carbon Nanotubes ◽  
Metallic Nanoparticles ◽  
Low Cost ◽  
Catalytic Method ◽  
Selected Area Electron Diffraction ◽  
Transmission Electron ◽  
High Resolution Tem ◽  
One Step

AbstractHigh-quality cobalt-filled carbon nanotubes (CNTs) were prepared in situ in the decomposition of benzene over Co/silica-gel nano-scale catalysts. Unlike the previous reports, the catalysts needn't be pre-reduced prior to the forming of Co-filled CNTs, thus the advantage of this method is that Co-filled CNTs can be produced in one step, at a relatively low cost. Transmission electron microscopy (TEM) investigation showed that the products contained abundance of CNTs and most of them were filled with metallic nanoparticles or nanorods. High-resolution TEM (HRTEM), selected area electron diffraction (SAED) patterns and energy dispersive X-ray spectroscopy (EDS) confirmed the presence of Co inside the nanotubes. The encapsulated Co was further identified always as high temperature alpha-Co phase with fcc structure, which frequently consists of twinned boundaries and stacking faults. Based on the experimental results, a possible growth mechanism of the Co-filled CNTs was proposed.

scholarly journals Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition

2018 ◽  
Vol 9 ◽  
pp. 2581-2598 ◽  
Author(s):  
Lukas Keller ◽  
Michael Huth
Keyword(s):  
Electron Beam ◽  
3D Structure ◽  
Three Dimensional ◽  
Pattern Generation ◽  
Proximity Effects ◽  
Writing Strategies ◽  
Direct Write ◽  
Nanoscale Structures ◽  
Geometrical Description ◽  
Electron Beam Induced Deposition

Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics. However, the generation of suitable pattern files that control the electron beam’s movement, and thereby reliably map the desired target 3D structure from a purely geometrical description to a shape-conforming 3D deposit, is nontrivial. To address this issue we developed several writing strategies and associated algorithms implemented in C++. Our pattern file generator handles different proximity effects and corrects for height-dependent precursor coverage. Several examples of successful 3D nanoarchitectures using different precursors are presented that validate the effectiveness of the implementation.

Field Emission Properties of Individual Carbon Nanotubes in Nanorobotic Manipulation and Electron-Beam-Induced Deposition

2004 ◽  
Vol 16 (6) ◽  
pp. 597-603 ◽  
Author(s):  
Fumihito Arai ◽  
◽  
Pou Liu ◽  
Lixin Dong ◽  
Toshio Fukuda ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Electron Beam ◽  
Field Emission ◽  
Emission Current ◽  
Emission Properties ◽  
Field Emission Properties ◽  
Field Emission Current ◽  
Multi Walled Carbon Nanotubes ◽  
Electron Beam Induced Deposition ◽  
Afm Cantilever

Field emission properties of individual multi-walled carbon nanotubes (MWNTs) were studied in nanorobotic manipulation and electron-beam-induced deposition (EBID). Nanotube emitters are constructed by picking up and assembling individual nanotubes on a commercially available atomic force microscope (AFM) cantilever or a tungsten probe. The relationship between field emission current and interelectrode distance was obtained by changing the distance between the tip of the nanotube emitter and the counterpart anode, which can be potentially applied as the principle for an approaching sensor to detect nanometer scale distance by observing field emission current in real time. Field emission current on a microampere scale from a CNT emitter was shown to be strong enough for EBID without obviously degrading emitters. Deposit topology was related to current density or the emitter shape, suggesting that information on emitter geometry could be obtained from EBID deposits. Energy dispersive X-ray spectrometry (EDS) analysis of deposits from W(CO)6showed that the tungsten mass exceeds 80% on the average among compositions. Much higher voltage may degrade the emitter, and saturated current may be used to adjust the emitter length in a controlled way.

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