Application of the three-dimensional reconstruction method using scanning electron microscopy stereo images for calibration of step height standards in sub-micrometer range
2001 ◽
Vol 50
(1)
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pp. 51-55
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1988 ◽
Vol 124
(9)
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pp. 1359-1363
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2016 ◽
Vol 291
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pp. 23704-23708
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2009 ◽
Vol 38
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pp. 135-145
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2018 ◽
Vol 149
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pp. 479-490
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2014 ◽
Vol 59
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pp. 908-915
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