Application of the three-dimensional reconstruction method using scanning electron microscopy stereo images for calibration of step height standards in sub-micrometer range
V.B. Mityukhlyaev
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V.G. Maslov
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T. Ahbe
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G. Dai
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X. Hu
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...
2001 ◽
Vol 50
(1)
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pp. 51-55
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1988 ◽
Vol 124
(9)
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pp. 1359-1363
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2012 ◽
Vol 53
(1)
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pp. 41-48
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Dongguang Wei
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Scott Jacobs
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Shannon Modla
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Shuang Zhang
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Carissa L. Young
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...
2016 ◽
Vol 291
(45)
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pp. 23704-23708
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Takafumi Watanabe
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Kiyokazu Kametani
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Yoh-ichi Koyama
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Daisuke Suzuki
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Yasutada Imamura
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...
2009 ◽
Vol 38
(2)
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pp. 135-145
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Henrike Semmler
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Jens T. Høeg
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Gerhard Scholtz
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Andreas Wanninger
2017 ◽
Vol 12
(4)
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pp. e0175078
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Ahmadreza Baghaie
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Ahmad Pahlavan Tafti
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Heather A. Owen
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Roshan M. D’Souza
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Zeyun Yu
2018 ◽
Vol 149
(5)
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pp. 479-490
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Bieke Vanslembrouck
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Anna Kremer
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Benjamin Pavie
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Frans van Roy
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Saskia Lippens
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...
Tsuneyuki Yamamoto
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Tomoka Hasegawa
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Hiromi Hongo
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Norio Amizuka
2014 ◽
Vol 59
(6)
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pp. 908-915
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A. A. Mikhutkin
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A. L. Vasiliev
2016 ◽
Vol 277
(5)
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pp. 565-574
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Tianyi Feng
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Brian D. Paterson
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Robyn Webb
◽
Stephen D. Johnston
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