Big Data Driven Key Factor Identification for Cycle-time Forecasting of Wafer Lots in Semiconductor Wafer Fabrication System

Journal of Mechanical Engineering ◽

10.3901/jme.2018.23.185 ◽

2018 ◽

Vol 54 (23) ◽

pp. 185

Author(s):

Junliang WANG

Keyword(s):

Big Data ◽

Data Driven ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Big data analytics for cycle time related feature selection in the semiconductor wafer fabrication system

Computers & Industrial Engineering ◽

10.1016/j.cie.2020.106362 ◽

2020 ◽

Vol 143 ◽

pp. 106362 ◽

Author(s):

Junliang Wang ◽

Peng Zheng ◽

Jie Zhang

Keyword(s):

Feature Selection ◽

Big Data ◽

Data Analytics ◽

Big Data Analytics ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication ◽

Related Feature

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A Data Driven Cycle Time Prediction With Feature Selection in a Semiconductor Wafer Fabrication System

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2017.2788501 ◽

2018 ◽

Vol 31 (1) ◽

pp. 173-182 ◽

Author(s):

Junliang Wang ◽

Jie Zhang ◽

Xiaoxi Wang

Keyword(s):

Feature Selection ◽

Data Driven ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Time Prediction ◽

Semiconductor Wafer Fabrication

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Big data analytics for forecasting cycle time in semiconductor wafer fabrication system

International Journal of Production Research ◽

10.1080/00207543.2016.1174789 ◽

2016 ◽

Vol 54 (23) ◽

pp. 7231-7244 ◽

Author(s):

Junliang Wang ◽

Jie Zhang

Keyword(s):

Big Data ◽

Data Analytics ◽

Big Data Analytics ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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The Case of a Novel Operational Distributed Storage Service for Big Data in a Semiconductor Wafer Fabrication Foundry

2018 IEEE 24th International Conference on Parallel and Distributed Systems (ICPADS) ◽

10.1109/padsw.2018.8644546 ◽

2018 ◽

Author(s):

Andy R.K. Chang ◽

Chia-Ping Tsai ◽

Kuan-Po Tseng ◽

Yu-Ling Chen ◽

Yen-Zhou Huang ◽

...

Keyword(s):

Big Data ◽

Distributed Storage ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Storage Service ◽

Semiconductor Wafer Fabrication

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Simulation based cause and effect analysis of cycle time and WIP in semiconductor wafer fabrication

Proceedings of the Winter Simulation Conference ◽

10.1109/wsc.2002.1166413 ◽

2003 ◽

Author(s):

Chao Qi ◽

Tuck Keat Tang ◽

A.I. Sivakumar

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Effect Analysis ◽

Cause And Effect ◽

Simulation Based ◽

Semiconductor Wafer Fabrication ◽

Cause And Effect Analysis

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Cycle time reduction at cluster tool in semiconductor wafer fabrication

2006 8th Electronics Packaging Technology Conference ◽

10.1109/eptc.2006.342794 ◽

2006 ◽

Author(s):

Aye Swe ◽

Amit Gupta ◽

Appa Sivakumar ◽

Peter Lendermann

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Cycle Time Reduction ◽

Semiconductor Wafer Fabrication ◽

Time Reduction ◽

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Bridging the Gap between Big Data System Software Stack and Applications: The Case of Semiconductor Wafer Fabrication Foundries

2018 IEEE International Conference on Big Data (Big Data) ◽

10.1109/bigdata.2018.8621954 ◽

2018 ◽

Author(s):

Chia-Ping Tsai ◽

Hung-Chang Hsiao ◽

Yu-Chang Chao ◽

Michael Hsu ◽

Andy R.K. Chang

Keyword(s):

Big Data ◽

Data System ◽

Wafer Fabrication ◽

System Software ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Product mix optimization under required cycle time for semiconductor wafer fabrication

2018 International Symposium on Semiconductor Manufacturing (ISSM) ◽

10.1109/issm.2018.8651153 ◽

2018 ◽

Author(s):

Chih-Min Yu ◽

Chung-Jen Kuo ◽

Chih-Lin Chiu ◽

Wei-Chin Wen ◽

Minghua Zhang

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Product Mix ◽

Semiconductor Wafer Fabrication

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Cycle time-oriented mid-term production planning for semiconductor wafer fabrication

International Journal of Production Research ◽

10.1080/00207543.2016.1278083 ◽

2017 ◽

Vol 55 (16) ◽

pp. 4662-4679 ◽

Author(s):

Phillip O. Kriett ◽

Sebastian Eirich ◽

Martin Grunow

Keyword(s):

Production Planning ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Quantifying the benefits of cycle time reduction in semiconductor wafer fabrication

Nineteenth IEEE/CPMT International Electronics Manufacturing Technology Symposium ◽

10.1109/iemt.1996.559705 ◽

2002 ◽

Author(s):

K. Nemoto ◽

E. Akcali ◽

R. Uzsoy

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Cycle Time Reduction ◽

Semiconductor Wafer Fabrication ◽

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