Study on the Porosity of TiO2 Films Prepared by Using Magnetron Sputtering Deposition

2011 ◽  
Vol 58 (4(1)) ◽  
pp. 883-885 ◽  
Author(s):  
Ding Ren ◽  
Yu Zou ◽  
ChangYong Zhan ◽  
NingKang Huang
Keyword(s):  
Magnetron Sputtering ◽  
Tio2 Films ◽  
Sputtering Deposition

Effect of substrate temperature on the arrangement of ultra-thin TiO2 films grown by a dc-magnetron sputtering deposition

2015 ◽  
Vol 585 ◽  
pp. 5-12 ◽  
Author(s):  
Virginijus Bukauskas ◽  
Saulius Kaciulis ◽  
Alessio Mezzi ◽  
Audružis Mironas ◽  
Gediminas Niaura ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Tio2 Films ◽  
Dc Magnetron Sputtering ◽  
Sputtering Deposition

D.c. magnetron sputtering deposition of TiO2 films in argon–oxygen gas mixtures: theory and experiments

1999 ◽  
Vol 116-119 ◽  
pp. 933-937 ◽  
Author(s):  
V. Vancoppenolle ◽  
P.-Y. Jouan ◽  
M. Wautelet ◽  
J.-P. Dauchot ◽  
M. Hecq
Keyword(s):  
Magnetron Sputtering ◽  
Gas Mixtures ◽  
Tio2 Films ◽  
Sputtering Deposition ◽  
Oxygen Gas ◽  
Theory And Experiments

Pulse synchronized substrate bias for the High Power Pulsed Magnetron Sputtering deposition of CrAlN

2021 ◽  
pp. 138792
Author(s):  
K. Bobzin ◽  
T. Brögelmann ◽  
N.C. Kruppe ◽  
M. Engels ◽  
C. Schulze
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Substrate Bias ◽  
Sputtering Deposition ◽  
Pulsed Magnetron

Structure and corrosion properties of thin TiO2 films obtained by magnetron sputtering

Vacuum ◽  
2019 ◽  
Vol 164 ◽  
pp. 224-232 ◽  
Author(s):  
A. Kozlovskiy ◽  
I. Shlimas ◽  
K. Dukenbayev ◽  
M. Zdorovets
Keyword(s):  
Magnetron Sputtering ◽  
Tio2 Films ◽  
Corrosion Properties

Wafer-Scale Growth of ITO Nanorods by Radio Frequency Magnetron Sputtering Deposition

2011 ◽  
Vol 158 (5) ◽  
pp. K131 ◽  
Author(s):  
Jae Hyoung Park ◽  
Hoo Keun Park ◽  
Jinhoo Jeong ◽  
Woong Kim ◽  
Byoung Koun Min ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Scale Growth ◽  
Sputtering Deposition ◽  
Wafer Scale
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