A Non-Contact Displacement Sensor with Diffraction Grating Metrology System for Profile Measurement

Author(s):  
Yu Rong Chen ◽  
Xu Dong Yang ◽  
Tie Bang Xie
2007 ◽  
Vol 364-366 ◽  
pp. 74-79
Author(s):  
Yu Rong Chen ◽  
Xu Dong Yang ◽  
Tie Bang Xie

Focus detection method is one of non-contact profile measurement methods. However, the measurement accuracy of current focus detection method is limited by voice coil motor adopted by it. In this paper, based on an improved Foucault focus detection method, a new non-contact displacement sensor with diffraction grating metrology system is presented. Driven by a piezoelectric actuator instead of a voice coil motor, and a diffraction grating metrology system being with it, the sensor has high measurement accuracy. During surface profile sampling, according to focusing deviation signal, the focusing lens was driven to move vertically by the piezoelectric actuator so that its focus was always located on the workpiece surface, synchronously the vertical displacement of the focusing lens was obtained by the diffraction grating metrology system as the profile height of sampling points. The displacements of all sampling points gave the whole profile of the measured surface, which can be processed by a characterization software to obtain the measurement result. The resolution of the non-contact displacement sensor was 10 nm.


2011 ◽  
Vol 328-330 ◽  
pp. 2102-2107
Author(s):  
Xin Li ◽  
Yu Rong Chen ◽  
Sheng Huai Wang

In this article, one new non-contact displacement sensor and its principle has been introduced; it is based upon improved Foucault focus detection and equipped with diffraction grating measuring system. Driven by piezoelectric actuator instead of voice coil motor and diffraction grating metrology system being adopted, the non-contact displacement sensor avoids non-linear error and other measurement error caused by the movement of the voice coil motor and therefore has higher measurement accuracy, which has be proved by series of experiments. During measuring the workpiece surface contour profiles, piezoelectric actuator drives focus object lens to make vertical displacement, and ensures focus in every sampling interval to go to the workpiece surface. In the mean time the focus error signal can be set to zero. The sensor has large range and high resolution, which can be applied in profile measurement. This non-contact displacement sensor resolution can reach 10nm.


2010 ◽  
Vol 37-38 ◽  
pp. 773-782
Author(s):  
Hao Huang ◽  
Xiang Yang Lei ◽  
Qiao Xu ◽  
Yin Biao Guo ◽  
Wei Luo

Grinding is a processing method that involves duplicating shape accuracy, so the shape accuracy of the grinding wheel plays a crucial role in machining accuracy. However, this accuracy is difficult to obtain. This paper describes an on-machine wheel profile measuring method that uses a non-contact displacement sensor to obtain the shape accuracy of an arc grinding wheel in a 3-axis aspheric surface grinding machine. This method involves data processing with object radius confined filtering, as well as evaluation using the methods of fitting residual error, measurement uncertainty, and machining result simulation. To verify the feasibility of this measuring method, experiments were performed using two diamond grinding wheels (FEPA D91 with grit size 75-90 μm, and FEPA D15 with grit size 10-25 μm). The experimental results indicate that the method is accurate enough to give the arc grinding wheel profile measurement, while the measuring uncertainty is of the same order of magnitude as the grit size (that is, tens of μm). Moreover, the simulation of the grinding effect with wheel profile measurement data can derive the relationship between the wheel profile error and the machining form error, and can be used to instruct the truing time determination for precision grinding.


2011 ◽  
Vol 50 (10) ◽  
pp. 1413 ◽  
Author(s):  
Shuangshuang Zhao ◽  
Changlun Hou ◽  
Jian Bai ◽  
Guoguang Yang ◽  
Feng Tian

1999 ◽  
Author(s):  
Masatake Shiraishi ◽  
Gongjun Yang

Abstract A laser displacement sensor which has a resolution of 0.5 μm was used to determine the measurement of a curved workpiece profile in turning. This sensor is attached to a specially designed stage and is operated by three motors which are controlled by a fuzzy control algorithm. The experimental results show that the measuring system can be applied to workpieces having inclination angles of up to around 45°. The proposed measuring system has a practical measuring accuracy to within ten micrometers.


2014 ◽  
Vol 939 ◽  
pp. 600-606 ◽  
Author(s):  
Eiki Okuyama ◽  
Shingo Asano ◽  
Yuichi Suzuki ◽  
Hiromi Ishikawa

In the straightness profile measurement of a mechanical workpiece, hardware datums have been the traditional standard. However, when the straightness profile is measured using a scanning displacement sensor set on an X-stage as the hardware datums, output of a displacement sensor includes the signal of straightness profile and the sensor’s parasitic motion, i.e. straightness error motion. Then, error separation techniques of the straightness profile from parasitic motions have been developed. For example, two-point method uses two displacement sensors and separates the sensor’s straightness error motion from the straightness profile. However, the conventional two-point method cannot measure a large-scale workpiece because the large sampling number causes random error amplification. In this article, the influence of the random error of generalized two-point method is shown. As the result of the theoretical analysis and numerical analysis, random error propagation decrease when sampling number increase. Further, experimental results obtained by generalized two-point method with large sampling number are analyzed using Wavelet transform and influence of error of the generalized two-point method is discussed in the space-spatial frequency domain.


2019 ◽  
Vol 296 ◽  
pp. 1-6 ◽  
Author(s):  
Wang Chen ◽  
Fu Feng ◽  
Dihan Chen ◽  
Wei Lin ◽  
Shih-Chi Chen

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