An Improved Edge Extraction Algorithm for Lithography Micrographs
2012 ◽
Vol 190-191
◽
pp. 1109-1112
Keyword(s):
For shape error analysis and correction of micro-structure in lithography, image edges should be extracted from micrographs of the structures. First several basic image edge detection algorithms are analyzed and compared. Then according to the unique conditions of micrographs in lithography experiments, an improved image edge extraction method is investigated. In this method Canny operator is selected as a basic algorithm, while the mathematical morphology is used in pre-processing for de-noising to reduce the uneven phenomenon. And an appropriate enhancement algorithm is used to enhance image contrast. Experimental results show that this method can extract the image edge from the micro-structure graphs effectively.
2018 ◽
Vol 29
(01)
◽
pp. 1850007
◽
2011 ◽
Vol 179-180
◽
pp. 554-557
Keyword(s):
2014 ◽
Vol 58
(1)
◽
pp. 1-13
◽
2019 ◽
Vol 78
(17)
◽
pp. 24067-24082
◽
2013 ◽
Vol 475-476
◽
pp. 184-187
2013 ◽
Vol 347-350
◽
pp. 3541-3545
◽
2011 ◽
Vol 204-210
◽
pp. 1386-1389
Keyword(s):