An Improved Edge Extraction Algorithm for Lithography Micrographs

2012 ◽  
Vol 190-191 ◽  
pp. 1109-1112
Author(s):  
Shan Shan Gong ◽  
Mu Jun Li

For shape error analysis and correction of micro-structure in lithography, image edges should be extracted from micrographs of the structures. First several basic image edge detection algorithms are analyzed and compared. Then according to the unique conditions of micrographs in lithography experiments, an improved image edge extraction method is investigated. In this method Canny operator is selected as a basic algorithm, while the mathematical morphology is used in pre-processing for de-noising to reduce the uneven phenomenon. And an appropriate enhancement algorithm is used to enhance image contrast. Experimental results show that this method can extract the image edge from the micro-structure graphs effectively.

2018 ◽  
Vol 29 (01) ◽  
pp. 1850007 ◽  
Author(s):  
Yi-Bin He ◽  
Ya-Jun Zeng ◽  
Han-Xin Chen ◽  
San-Xia Xiao ◽  
Yan-Wei Wang ◽  
...  

Traditional edge detection operators such as Prewitt operator, LOG operator and Canny operator, etc. cannot meet the requirements of the modern industrial measurement. This paper proposes a kind of image edge detection algorithm based on improved morphological gradient. It can be detect the image using structural elements, which deals with the characteristic information of the image directly. Choosing different shapes and sizes of structural elements to use together, the ideal image edge information can be detected. The experimental result shows that the algorithm can well extract image edge with noise, which is clearer, and has more detailed edges compared with the previous edge detection algorithm.


2011 ◽  
Vol 179-180 ◽  
pp. 554-557
Author(s):  
Da Hui Li ◽  
Ming Diao

In the paper, the first introduced multifractal features of image, and defined some measures; then described procedures of the edge extraction algorithm; the final analyses the results of experiment and selection criteria commonly used in multifractal, proposing a different multiple fractal image, the algorithm has excellent effect on edge extraction, highlights the detail information of the main edge.


2014 ◽  
Vol 58 (1) ◽  
pp. 1-13 ◽  
Author(s):  
Yi Zhang ◽  
Kai Lu ◽  
YingHui Gao

2019 ◽  
Vol 78 (17) ◽  
pp. 24067-24082 ◽  
Author(s):  
Zhongyue Lu ◽  
Xiaoming Wang ◽  
Jianzhong Shang ◽  
Zirong Luo ◽  
Chongfei Sun ◽  
...  

Author(s):  
Yonghao Yan ◽  
Jiangtao Qin ◽  
Zhengyang Zhang ◽  
Jinlei Liu ◽  
Jialong Sun ◽  
...  

2013 ◽  
Vol 475-476 ◽  
pp. 184-187
Author(s):  
Wen Guo Li ◽  
Shao Jun Duan

We present a camera calibration method based on circle plane board. The centres of circles on plane are regarded as the characteristic points, which are used to implement camera calibration. The proposed calibration is more accurate than many previous calibration algorithm because of the merit of the coordinate of circle centre being obtained from thousand of of edge pionts of ellipse, which is very reliable to image noise caused by edge extraction algorithm. Experiments shows the proposed algorithm can obtain high precise inner parameters, and lens distortion parameters.


2013 ◽  
Vol 347-350 ◽  
pp. 3541-3545 ◽  
Author(s):  
Dan Dan Zhang ◽  
Shuang Zhao

The traditional Canny edge detection algorithm is analyzed in this paper. To overcome the difficulty of threshold selecting in Canny algorithm, an improved method based on Otsu algorithm and mathematical morphology is proposed to choose the threshold adaptively and simultaneously. This method applies the improved Canny operator and the image morphology separately to image edge detection, and then performs image fusion of the two results using the wavelet fusion technology to obtain the final edge-image. Simulation results show that the proposed algorithm has better anti-noise ability and effectively enhances the accuracy of image edge detection.


2011 ◽  
Vol 204-210 ◽  
pp. 1386-1389
Author(s):  
Deng Yin Zhang ◽  
Li Xiao ◽  
Shun Rong Bo

The existing edge detection algorithms with wavelet transform need to artificially set the threshold value and are lack of flexibility.To salve the limitations, in this paper, we propose a WT(wavelet transform)-based edge detection algorithm with adaptive threshold, which uses threshold value iteration method to achieve adaptive threshold setting. Comparison of experiment results for the CT image shows that the method which improve the clarity and continuity of the image edge can effectively distinguish edge and noise, and get more completely information of the edge. It has good application value in the fields of medical clinical diagnosis and image processing.


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