Optimization of Super-Long CNT Forests Growth on Conductive Substrate by Water Assisted CVD

Water assisted chemical vapor deposition (CVD) is used widely to synthesize super long, vertically aligned, densely packed carbon nanotube (CNT) forests. Various water assisted CVD parameters give the important influence on the quality of CNT forests. In this paper, several main parameters in water assisted CVD are optimized, such as the flow rate of H2, the content of water and growth temperature. Furthermore, growth on the conductive substrate is also studied by water assisted CVD. Under optimum condition with 10 minutes growth, the length of CNT forests could be 815 μm on silicon substrate and 369 μm on conductive substrate.

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Effect of growth temperature and ethanol flow rate on synthesis of single-walled carbon nanotube by alcohol catalytic chemical vapor deposition using Ir catalyst in hot-wall reactor

Japanese Journal of Applied Physics ◽

10.35848/1347-4065/abd0c5 ◽

2020 ◽

Vol 60 (1) ◽

pp. 015003

Author(s):

Ai Misaki ◽

Takahiro Saida ◽

Shigeya Naritsuka ◽

Takahiro Maruyama

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Flow Rate ◽

Growth Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Single Walled Carbon Nanotube ◽

Catalytic Chemical Vapor Deposition ◽

Single Walled Carbon

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Growth of vertically aligned carbon-nanotube array on large area of quartz plates by chemical vapor deposition

Applied Physics A ◽

10.1007/s003390101187 ◽

2002 ◽

Vol 74 (3) ◽

pp. 419-422 ◽

Cited By ~ 29

Author(s):

W.D. Zhang ◽

Y. Wen ◽

W.C. Tjiu ◽

G.Q. Xu ◽

L.M. Gan

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Vapor Deposition ◽

Chemical Vapor ◽

Large Area ◽

Nanotube Array ◽

Carbon Nanotube Array ◽

Vertically Aligned

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Chemical Vapor Deposition of Vertically Aligned Carbon Nanotube Arrays: Critical Effects of Oxide Buffer Layers

Nanoscale Research Letters ◽

10.1186/s11671-019-2938-6 ◽

2019 ◽

Vol 14 (1) ◽

Cited By ~ 2

Author(s):

Haohao Li ◽

Guangjie Yuan ◽

Bo Shan ◽

Xiaoxin Zhang ◽

Hongping Ma ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Vapor Deposition ◽

Chemical Vapor ◽

Buffer Layers ◽

Nanotube Arrays ◽

Carbon Nanotube Arrays ◽

Vertically Aligned

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Fabrication of Vertically-Aligned Carbon Nanotube Electrodes Using Grid-Inserted Plasma-Enhanced Chemical Vapor Deposition for Chemical Sensors

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.2028 ◽

2008 ◽

Vol 47 (4) ◽

pp. 2028-2031 ◽

Cited By ~ 1

Author(s):

Yoshihiro Kojima ◽

Shigeru Kishimoto ◽

Mina Okochi ◽

Hiroyuki Honda ◽

Takashi Mizutani

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Chemical Sensors ◽

Vapor Deposition ◽

Chemical Vapor ◽

Vertically Aligned

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Fabrication of vertically aligned N-doped carbon nanotube arrays on vermiculite by horizonal chemical vapor deposition

Fullerenes Nanotubes and Carbon Nanostructures ◽

10.1080/1536383x.2020.1828877 ◽

2020 ◽

pp. 1-10

Author(s):

Xiao-Di Wang ◽

Ping Wu ◽

Peng Liao ◽

Pei-Pei Hou ◽

Zhi Liu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Vapor Deposition ◽

Chemical Vapor ◽

Nanotube Arrays ◽

Carbon Nanotube Arrays ◽

Vertically Aligned

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Patterned Arrays of Vertically Aligned Carbon Nanotube Microelectrodes on Carbon Films Prepared by Thermal Chemical Vapor Deposition

Analytical Chemistry ◽

10.1021/ac801552a ◽

2008 ◽

Vol 80 (22) ◽

pp. 8835-8839 ◽

Cited By ~ 19

Author(s):

Xianming Liu ◽

Keith H. R. Baronian ◽

Alison J. Downard

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Vapor Deposition ◽

Chemical Vapor ◽

Carbon Films ◽

Thermal Chemical Vapor Deposition ◽

Vertically Aligned

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Patterned growth of vertically aligned carbon nanotube arrays using colloidal lithography and plasma enhanced chemical vapor deposition

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2015.07.286 ◽

2015 ◽

Vol 650 ◽

pp. 86-91 ◽

Cited By ~ 7

Author(s):

Yuhong Man ◽

Zhiqian Chen ◽

Yongping Zhang ◽

Peitao Guo

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Vapor Deposition ◽

Chemical Vapor ◽

Nanotube Arrays ◽

Colloidal Lithography ◽

Patterned Growth ◽

Carbon Nanotube Arrays ◽

Vertically Aligned

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Synthesis of Controllably Grown Carbon Nanotubes Interconnects

MRS Proceedings ◽

10.1557/proc-1018-ee05-02 ◽

2007 ◽

Vol 1018 ◽

Author(s):

Seon Woo Lee ◽

David Katz ◽

Avi Kornblit ◽

Daniel Lopez ◽

Haim Grebel

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Vapor Deposition ◽

Low Temperatures ◽

Chemical Vapor ◽

Single Wall Carbon Nanotube ◽

Single Wall Carbon ◽

Multi Wall Carbon Nanotube

AbstractIntra-connects (bridges spanning across in plane electrodes), which were made of carbon nanotube (CNT), were fabricated by CO Plasma Enhanced Chemical Vapor Deposition (PECVD), ethanol CVD and pyrolitic CO CVD. CO PECVD has been used with CO/H2 mixture at relatively low temperatures. Its yield was relatively low though and the quality of CNT intra-connect was not to par. Ethanol CVD resulted in many more multi-wall carbon nanotube (MWCNT) than single-wall carbon nanotube (SWCNT) intra-connects. CO CVD was the most effective and simplest way to grow CNT interconnects among the three methods, yielding well-aligned and straight SWCNT bridges.

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