Effect of RF Power on the Chemical Bonding and Humidity Sensing Properties of a-CNx Thin Films

2015 ◽  
Vol 1107 ◽  
pp. 655-660 ◽  
Author(s):  
N.F.H. Aziz ◽  
Richard Ritikos ◽  
S.A.A. Kamal ◽  
N.I. Azman ◽  
Rozidawati Awang
Keyword(s):  
Thin Films ◽  
Chemical Bonding ◽  
Electrical Response ◽  
Chemical Vapor ◽  
Dendritic Morphology ◽  
Rf Power ◽  
Humidity Sensing ◽  
Sensing Properties ◽  
Porous Granule ◽  
Humidity Sensing Properties

Amorphous carbon nitride (a-CNx) thin films were deposited using radio frequency plasma enhanced chemical vapor deposition (rf-PECVD) technique. A set of a-CNxthin films were prepared using pure methane (CH4) gas diluted with nitrogen (N2) gas. The rf power was varied at 50, 60, 70, 80, 90 and 100 W. The characterization techniques used were Fourier transform infrared spectroscopy (FTIR) and field emission scanning electron microscope (FESEM). Humidity sensing properties of the a-CNxthin films were investigated by recording their electrical response to relative humidity (RH) at room temperature. Chemical bonding analysis clearly showed the presence of nitrile bands in the deposited films. The FESEM images of the films show a porous, granule-like and dendritic morphology. The average resistance of the a-CNxthin film is changed from 23.7 kΩ to 5.8 kΩ in the range of 5 to 95%RH. The films show a good response and repeatability as a humidity sensing materials. This work showed that rf power has a significant effects on the chemical bonding, morphology and electrical properties of the a-CNxfilms.

Study of humidity sensing properties and ion beam induced modifications in SnO2-TiO2 nanocomposite thin films

2020 ◽  
Vol 392 ◽  
pp. 125768 ◽  
Author(s):  
Vikas Kumar ◽  
Vishnu Chauhan ◽  
Jagjeevan Ram ◽  
Rashi Gupta ◽  
Shalendra Kumar ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Humidity Sensing ◽  
Sensing Properties ◽  
Nanocomposite Thin Films ◽  
Humidity Sensing Properties

Humidity Sensing Properties of Carbon Nano-Tube Thin Films

2011 ◽  
Vol 9 (5) ◽  
pp. 1649-1653 ◽  
Author(s):  
KH. S. Karimov ◽  
M. M. Ahmed ◽  
Z. M. Karieva ◽  
M. Saleem ◽  
A. Mateen ◽  
...  
Keyword(s):  
Thin Films ◽  
Humidity Sensing ◽  
Sensing Properties ◽  
Carbon Nano Tube ◽  
Humidity Sensing Properties

Investigation of Optical and Humidity-Sensing Properties of Vanadyl Phthalocyanine-Derivative Thin Films

2012 ◽  
Vol 566 (1) ◽  
pp. 22-32 ◽  
Author(s):  
F. Aziz ◽  
K. Sulaiman ◽  
K. S. Karimov ◽  
M. R. Muhammad ◽  
M. H. Sayyad ◽  
...  
Keyword(s):  
Thin Films ◽  
Humidity Sensing ◽  
Sensing Properties ◽  
Phthalocyanine Derivative ◽  
Humidity Sensing Properties

scholarly journals Humidity Sensing Properties of Plasma Polymerized Organic Thin Films.

1999 ◽  
Vol 12 (1) ◽  
pp. 53-58
Author(s):  
J. T. Kim ◽  
P. K. Shin ◽  
G. B. Park ◽  
J. K. Park ◽  
D. C. Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Organic Thin Films ◽  
Humidity Sensing ◽  
Sensing Properties ◽  
Humidity Sensing Properties

Humidity sensing properties of Nation and sol-gel derived SiO2/Nafion composite thin films

1997 ◽  
Vol 40 (2-3) ◽  
pp. 217-222 ◽  
Author(s):  
Chang-Dong Feng ◽  
Shen-Liang Sun ◽  
Hui Wang ◽  
Carlo U. Segre ◽  
Joseph R. Stetter
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Composite Thin Films ◽  
Humidity Sensing ◽  
Sensing Properties ◽  
Humidity Sensing Properties

scholarly journals The Influence of Annealing on Optical and Humidity Sensing Properties of Poly(Vinyl Alcohol-Co-Vinyl Acetal) Thin Films

Proceedings ◽  
2019 ◽  
Vol 42 (1) ◽  
pp. 16 ◽  
Author(s):  
Katerina Lazarova ◽  
Silvia Bozhilova ◽  
Siika Ivanova ◽  
Darinka Christova ◽  
Tsvetanka Babeva
Keyword(s):  
Thin Films ◽  
Vinyl Alcohol ◽  
Volume Ratio ◽  
Goal Function ◽  
Poly Vinyl Alcohol ◽  
Copolymer Composition ◽  
Humidity Sensing ◽  
Sensing Properties ◽  
Normal Light ◽  
Humidity Sensing Properties

Hydrophobically modified poly(vinyl alcohol)s of varied copolymer composition were tested as active media for optical sensing of humidity. Copolymer thin films were deposited on silicon substrate using water-methanol solution in a volume ratio of 20:80 and concentration of 1 wt%. Films were subjected to low (60 °C) and moderate (180 °C) temperature annealing in order to study the temperature influence on optical and humidity sensing properties. Refractive index, extinction coefficient along with thickness of the films were determined by non-linear minimization of the goal function comprising measured and calculated reflectance spectra at normal light incidence. The humidity sensing ability of the films was studied through reflectance measurements at different humidity levels in the range 5–95 %RH. The influence of temperature annealing on optical and sensing properties was demonstrated and discussed.

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