Effect of Deposition Temperature on Surface Roughness of Nanocrystalline Diamond Film
2012 ◽
Vol 476-478
◽
pp. 2353-2356
Keyword(s):
Nanocrystalline diamond (NCD) films were synthesized by hot-filament chemical vapor deposition (HFCVD) method at different temperatures (600 °C, 620°C, 640°C and 660°C). The AFM and Raman analyses demonstrated that deposition temperature has a great effect on the surface roughness and quality of NCD films and 620°C is the temperature to grow NCD films with smooth surfaces.
Keyword(s):
2004 ◽
Vol 471-472
◽
pp. 52-58
◽
1996 ◽
Vol 11
(7)
◽
pp. 1765-1775
◽
2007 ◽
Vol 16
(8)
◽
pp. 1530-1540
◽
Keyword(s):
1994 ◽
Vol 55
(6)
◽
pp. 525-529
◽
Keyword(s):