Design and Fabrication of a Micro-Actuator Based on Electromagnetic Membrane Device
The purpose of this study is to develop a micro electro-magnetic actuator manufactured by MEMS-based fabrication and electroplating techniques. This actuator presented a novel technique in the electromagnetic fabrication and smaller physical size than the traditional counterparts for micro actuators and provides a faster response time and lower cost. A micro coil structure is released from FeCl3 etchant and bonded on a thin film (Parafilm”M”, Pechiney Plastic Packaging Inc.) to achieve an actuator-membrane structure. When an external AC power is applied to a micro coil, a magnetic field is created to attract and repel through an NdFeB permanent magnet, and the displacement of the membrane is increased as a current of AC power. The results show the measured magnetic field intensity weakens as the distance between the coil and the Gauss meter probe increases. However, it is observed that the magnetic field intensity does not increase linearly with the number of series coils, which is due to the distance between series coils.