Optimization of the Sputtering Process Parameters of AZO Films with Multiple Quality Characteristics

2012 ◽  
Vol 512-515 ◽  
pp. 1961-1964 ◽  
Author(s):  
Dong Cherng Wen ◽  
Chun Yao Hsu ◽  
Ai Huei Chiou
Keyword(s):  
Electrical Resistivity ◽  
Substrate Temperature ◽  
Process Parameters ◽  
Visible Range ◽  
Multiple Quality Characteristics ◽  
Deposition Parameters ◽  
Average Transmittance ◽  
Aluminum Doped Zinc Oxide ◽  
Temperature Deposition ◽  
Grey Relational

Aluminum-doped zinc oxide (AZO) films were deposited on polyethylene terephthalate (PET) by radio frequency magnetron sputtering. The influence of the various deposition parameters (R.F. power, substrate-to-target distance, substrate temperature, deposition time) on electrical, morphological and optical properties of AZO/PET films was investigated. The use of grey-based Taguchi method to determine the optimization of the process parameters by considering multiple performance characteristics has been reported. The electrical resistivity and the average transmittance of the AZO films were improved by increasing the substrate temperature. Finds based on the grey relational analysis show that the lowest electrical resistivity of AZO films to be about 1.6 × 10-3Ω-cm, and visible range transmittance about 80%.

SOME DIELECTRIC AND ELECTRONIC PROPERTIES OF CdSe FILMS

1967 ◽  
Vol 45 (3) ◽  
pp. 1353-1362 ◽  
Author(s):  
D. E. Brodie ◽  
J. LaCombe
Keyword(s):  
Dielectric Constant ◽  
Electrical Resistivity ◽  
Film Thickness ◽  
Substrate Temperature ◽  
Electronic Properties ◽  
Experimental Error ◽  
Heat Treating ◽  
High Resistivity ◽  
Temperature Deposition ◽  
Lower Resistivity

The real part of the dielectric constant, K′, has been measured for high-resistivity films of CdSe at temperatures between 4.2 and 240 °K, at frequencies between 500 Hz and 50 kHz. Typically, its value is 9.0 at 4.2 °K, 9.5 at 77 °K, and it increases slowly with temperature to 10.0 at 240 °K. Within experimental error it is independent of frequency in the above range.The electrical resistivity of vacuum-deposited CdSe films has been investigated to determine the effect of substrate temperature, deposition rate, film thickness, sample aging, and heat treating. Measurements of film resistivity variations with temperature from 125 to 350 °K reveals the presence of two activation energies in the lower-resistivity films, but only one in the high-resistivity films in this temperature range.

Untersuchungen zur Epitaxie dünner Goldaufdampfschichten auf Alkalihalogeniden im Ultrahochvakuum

1968 ◽  
Vol 23 (10) ◽  
pp. 1526-1536 ◽  
Author(s):  
R. W. Adam
Keyword(s):  
Substrate Temperature ◽  
Crystal Orientation ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Gold Films ◽  
Oriented Growth ◽  
Deposition Rates ◽  
Deposition Parameters ◽  
Temperature Deposition ◽  
Substrate Temperatures

In the present paper the oriented growth of gold on alkalihalides, cleaved in ultra high vacuum has been investigated. The dependence of the crystal orientation on the deposition parameters substrate temperature, deposition rate, and the physical properties of the substrate were studied systematically. At suitable substrate temperatures and deposition rates it was possible to obtain epitaxial gold films on KCl, KBr and KJ.

scholarly journals Analysis and optimization of laser drilling process during machining of AISI 303 material using grey relational analysis approach

2021 ◽  
Vol 3 (3) ◽  
Author(s):  
V. Chengal Reddy ◽  
Thota Keerthi ◽  
T. Nishkala ◽  
G. Maruthi Prasad Yadav
Keyword(s):  
Surface Roughness ◽  
Process Parameters ◽  
Grey Relational Analysis ◽  
Pulse Frequency ◽  
Laser Drilling ◽  
Simultaneous Optimization ◽  
Fibre Laser ◽  
Drilling Process ◽  
Relational Analysis ◽  
Grey Relational

AbstractSurface roughness and heat-affected zone (HAZ) are the important features which influence the performance of the laser-drilled products. Understanding the influence of laser process parameters on these responses and identifying the cutting conditions for simultaneous optimization of these responses are a primary requirement in order to improve the laser drilling performance. Nevertheless, no such contribution has been made in the literature during laser drilling of AISI 303 material. The aim of the present work is to optimize the surface roughness (Ra) and HAZ in fibre laser drilling of AISI 303 material using Taguchi-based grey relational analysis (GRA). From the GRA methodology, the recommended optimum combination of process parameters is flushing pressure at 30 Pa, laser power at 2000 W and pulse frequency at 1500 Hz for simultaneous optimization of Ra and HAZ, respectively. From analysis of variance, the pulse frequency is identified as the most influenced process parameters on laser drilling process performance.

Bilayer PMMA antireflective coatings via microphase separation and MAPLE

2020 ◽  
Vol 41 (2) ◽  
pp. 164-173
Author(s):  
Yunlong Guo ◽  
Shuzhen Ren
Keyword(s):  
Microphase Separation ◽  
Incident Light ◽  
Visible Range ◽  
Laser Evaporation ◽  
Antireflective Coatings ◽  
Porous Network ◽  
Cross Sectional ◽  
Polymer Thin Film ◽  
Deposition Parameters ◽  
Surface Morphologies

Abstract A poly(methyl methacrylate) (PMMA) bilayer antireflective coating (ARC) is designed based on polymeric microphase separation and matrix-assisted pulsed laser evaporation (MAPLE). The spin-coated layer shows subwavelength porous network structures, after phase separation via annealing and removal of the polystyrene (PS) phase, while the MAPLE deposited surface layer exhibits a biomimic moth-eye structure on glass to trap the incident light. The elaborate spin coated structure can be controlled flexibly by changing the ratio of mixture, annealing time and temperature, and the moth-eye structure can also be tuned by deposition parameters. The transmittance of the ARC presents a maximum of 95.64% and an average of 94.81% in visible range. The moth-eye structure on glass substrate formed by nanoglobules makes positive contributions to the improvement of transmittance according to UV–Vis result and simulation. The wetting motion of PMMA globules is observed as well by the comparison of AFM surface morphologies and cross-sectional profiles of globules on glass and polymer thin film. This work is a novel attempt to fabricate bilayer ARC with two different structures by a single polymeric material and will provide new route for fabrication of multilayer ARCs.

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